Dummy wafer
Granted 16 May 2017 · 1 office action
Assignee: Tokyo Electron Limited
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Attorney: Attorney · Log in to unlock
Inventors: Kohei Fukushima, Yutaka Motoyama · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the application
7 dated eventsDescription
1 parts›FIG. 1 is a top plan view of…
FIG. 1 is a top plan view of a dummy wafer showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is an enlarged portion view taken along lines 3 - 3 in FIG. 1 ;
FIG. 4 is a cross-sectional view taken along line 4 - 4 in FIG. 3 ; and,
FIG. 5 is a cross-sectional view taken along line 5 - 5 in FIG. 3 .
The broken lines shown in the drawings represent portions of the dummy wafer that form no part of the claimed design. Right, left and back views of the dummy wafer shown in FIG. 1 have been omitted because they are the same as the front view. The bottom view of the dummy wafer shown in FIG. 1 has been omitted because it forms no part of the claimed design.
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