Inventor
Yutaka Motoyama
Inventor
Oshu, JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices13%
LOC1313%
H01JElectric discharge tubes or discharge lamps9%
B05CApparatus for applying fluent materials to surfaces, in general4%
C30BSingle-crystal growth4%
H10BElectronic memory devices4%
PatentTitleYear
11,062,904Method of forming polysilicon film and film forming apparatus202110,676,820Cleaning method and film forming method20209,970,111Substrate processing apparatus having ground electrode20189,776,202'Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus'2017D0786810'Dummy wafer'2017D0785576'Dummy wafer'2017D0784937'Dummy wafer'20179,487,859'Operating method of vertical heat treatment apparatus, storage medium, and vertical heat treatment apparatus'20169,373,498'Method of operating vertical heat treatment apparatus, vertical heat treatment apparatus and non-transitory recording medium'20168,608,902'Plasma processing apparatus'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2021Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2013Patents assigned to FUKUSHIMA KOHEI (1)· patent assignee history
2013Patents assigned to MATSUURA HIROYUKI (1)· patent assignee history
2013Patents assigned to MOTOYAMA YUTAKA (1)· patent assignee history
2013Patents assigned to TAKAHASHI TOSHIKI (1)· patent assignee history
2013–2018Based in Oshu, JP· patent location history
2017Based in Iwate, JP· patent location history
2020–2021Based in Nirasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 2013–2021 |
| FUKUSHIMA KOHEI | 1 | 2013 |
| MATSUURA HIROYUKI | 1 | 2013 |
| MOTOYAMA YUTAKAself | 1 | 2013 |
| TAKAHASHI TOSHIKI | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Oshu, JP | 5 | 2013–2018 |
| Iwate, JP | 3 | 2017 |
| Nirasaki, JP | 2 | 2020–2021 |