Gas injection plate
Granted 16 Jun 2015 · no office action yet
Current assignee: HSBC BANK USA, NATIONAL ASSOCIATION · originally Veeco ALD Inc.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Sang In Lee, Hyoseok Daniel Yang, Daniel Ho Lee, Samuel S. Pak · Examiner: Patricia Palasik · AU 2918 · TC 2900
Life of the application
7 dated eventsDescription
1 parts›FIG. 1 is a perspective view of a…
FIG. 1 is a perspective view of a gas injection plate, showing our new design.
FIG. 2 is another perspective view of the gas injection plate of FIG. 1 .
FIG. 3 is a front view of the gas injection plate of FIG. 1 .
FIG. 4 is a rear view of the gas injection plate of FIG. 1 .
FIG. 5 is a left side view of the gas injection plate of FIG. 1 .
FIG. 6 is a right side view of the gas injection plate of FIG. 1 .
FIG. 7 is a top view of the gas injection plate of FIG. 1 ; and,
FIG. 8 is a bottom view of the gas injection plate of FIG. 1 .
Claims as granted
1 claimLog in to read the claims of this application.
Log in to unlockClassifications
1 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this application are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockDocuments
Log in to open the documents of this file: the application as filed, every office action and response, the notice of allowance.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlock