Deposition chamber liner

FIG. 1 is a top perspective view of a deposition chamber liner.

FIG. 2 is a bottom perspective view of the deposition chamber liner of FIG. 1 .

FIG. 3 is a top plan view of the deposition chamber liner of FIG. 1 .

FIG. 4 is a bottom plan view of the deposition chamber liner of FIG. 1 .

FIG. 5 is a side elevation view of the deposition chamber liner of FIG. 1 , the other sides being identical.

FIG. 6 is a side cross-sectional view of the deposition chamber liner of FIG. 1 , taken along section line 6 - 6 of FIG. 5 .

FIG. 7 is an enlarged partial cross-sectional view of FIG. 6 ; and,

FIG. 8 is an enlarged partial cross-sectional view of FIG. 6 .

The jagged lines on the sides of FIGS. 7 and 8 are utilized to show where the enlarged view is broken away from the remainder of the deposition chamber liner of FIG. 6 . The jagged lines on FIGS. 7 and 8 form no part of the claimed design.