USPatent applicationPatented

Plasma reactor showerhead face plate having concentric ridge pattern

Granted 19 Jul 2011 · no office action yet

Current assignee: Novellus Systems, Inc. · originally Lam Research

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Inventors: Ilia Kalinovshi, Ivelin A. Angelov, James E. Caron · Examiner: Robin Webster · AU 2911 · TC 2900

Application· this page
29/378,161
filed 29 Oct 2010
Publication
Not published
not published
Patent
US D641829
granted 19 Jul 2011

Life of the application

5 dated events
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Description

1 parts
›FIG. 1 is a lower front perspective view…

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,

FIG. 5 is a cross-sectional view thereof, taken generally along line 5 — 5 in FIG. 3 , showing succinctly the surface contours seen in FIGS. 1 and 3 .

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims as granted

1 claim

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Classifications

1 codes
USPC · US Patent Classification
D23/213

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Pendency
0.7 y
263 days filing → grant
Office actions
0
none on record
Examiner
Robin Webster
art unit 2911 · TC 2900
Citations: 10 back · 0 forward

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Chain of title

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