Plasma reactor showerhead face plate having concentric ridge pattern
Granted 19 Jul 2011 · no office action yet
Current assignee: Novellus Systems, Inc. · originally Lam Research
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Inventors: Ilia Kalinovshi, Ivelin A. Angelov, James E. Caron · Examiner: Robin Webster · AU 2911 · TC 2900
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5 dated eventsDescription
1 parts›FIG. 1 is a lower front perspective view…
FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,
FIG. 5 is a cross-sectional view thereof, taken generally along line 5 — 5 in FIG. 3 , showing succinctly the surface contours seen in FIGS. 1 and 3 .
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