USPatentGranted
S1

Plasma reactor showerhead face plate having concentric ridge pattern

Granted 19 Jul 2011 · no office action yet

Current assignee: Novellus Systems, Inc. · originally Lam Research

Law firm: Law firm · Log in to unlock

Attorney: Attorney · Log in to unlock

Inventors: Ilia Kalinovshi, Ivelin A. Angelov, James E. Caron · Examiner: Robin Webster · AU 2911 · TC 2900

Application
29/378,161
filed 29 Oct 2010
Publication
Not published
not published
Patent· this page
US D641829
granted 19 Jul 2011

Life of the patent

2 dated events
⤢ drag to zoomSepOctNovDec2011FebMarAprMayJunJulAugSepProsecution
Prosecutionhover for detail · click to open

Description

1 parts
›FIG. 1 is a lower front perspective view…

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,

FIG. 5 is a cross-sectional view thereof, taken generally along line 5 — 5 in FIG. 3 , showing succinctly the surface contours seen in FIGS. 1 and 3 .

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D23/213

Claim changes

Soon
Coming soonHow the claims changed between publication and grant

See which claims were amended, added or cancelled during examination, with every added and removed word marked.

AmendedAddedCancelledUnchanged

The published claims of this patent are not paired with the granted ones in what we hold.

File wrapper

Pendency
0.7 y
263 days filing → grant
Office actions
0
none on record
Examiner
Robin Webster
art unit 2911 · TC 2900
Citations: 10 back · 0 forward

See the full prosecution history — every USPTO and applicant action on this file, in order.

Log in to unlock

Chain of title

⤢ drag to zoom2012201420162018202020222024202620282030Owner 1
Titlehover for detail · click to open

See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.

Log in to unlock

Term & fees

See the term timeline — pendency span, in-force span, the maintenance fees paid and both computed expiry dates.

Log in to unlock

Worldwide family

3 members · 3 offices
US1JP1TW1
this patentIP5 & PCTother officessolid = grantedhover for detail · click to open
Members
3
DOCDB simple family 44262361
Offices
3
US · JP
Granted
2 of 3
grant date present
›IP5 & PCT — 2 members
OfficePublicationKindPublishedFiledStatusTitle
USthis patentUS-D641829-SS119 Jul 201129 Oct 2010grantedPlasma reactor showerhead face plate having concentric ridge pattern
JPJP-1433951-SS9 Feb 201515 Apr 2011grantedno title held
›Other offices — 1 members
OfficePublicationKindPublishedFiledStatusTitle
TWTW-D148169-SS11 Jul 201215 Apr 2011publishedPlasma reactor showerhead face plate having concentric ridge pattern

Validity challenges

See the validity challenges on record — reexaminations, IPRs and PGRs, with their institution decisions and outcomes.

Log in to unlock

Citations

See every patent this one cites and every patent that cites it back — publication, assignee, and how each one was found.

Log in to unlock