Coater cup

FIG. 1 is a top perspective view of a coater cup showing new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a vertical sectional view taken along line 7 — 7 of FIG. 5 thereof; and,

FIG. 8 is an enlarged view taken along line 8 — 8 of FIG. 7 thereof.

The article is mounted on an upper end opening portion of a cup base portion surrounding a lower portion side of a spin chuck of a coater which holds a semiconductor wafer.