Heat dissipation deterrence link for semiconductor manufacture
Granted 10 Mar 2009 · no office action yet
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Mitsuhiro Okada, Daisuke Suzuki, Yoshikazu Furusawa · Examiner: Selina Sikder · AU 2912 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›FIG. 1 is a front view of the…
FIG. 1 is a front view of the design for a heat dissipation deterrence link for semiconductor manufacture in accordance with the invention;
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a plan view thereof;
FIG. 6 is a bottom view thereof;
FIG. 7 is a sectional view thereof along A—A of FIG. 1 ;
FIG. 8 is a perspective view thereof; and,
FIG. 9 shows a heat dissipation deterrence link for semiconductor manufacture in accordance with the invention in use.
In practice, a heat dissipation deterrence link is placed on the bottom of a thermostat plug that is included in a process tube for semiconductor manufacture. Then, in use, the link suppresses heat from a bottom sub-heater. Preferably, the heat dissipation deterrence link for semiconductor manufacture in accordance with the present invention is fabricated from quartz.
The broken line showing the environment is for illustrative purposes only and forms no part of the claimed design.
Claims as granted
1 claimLog in to read the claims of this application.
Log in to unlockClassifications
1 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this application are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockDocuments
Log in to open the documents of this file: the application as filed, every office action and response, the notice of allowance.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlock