Film resist and method of manufacturing semiconductor device

The present invention relates to a film resist used in patterning, and a method of manufacturing a semiconductor device.

Description of the Background Art

A power device, which is an electric power-use semiconductor element, is used in various fields. The various fields include a field such as home appliances, electric vehicles, railroads and the like, and a field such as solar photovoltaic power generation, wind power generation and the like which are increasingly attracting attention as renewable energy.

In such fields, for example, an inverter circuit is configured using the power device, which inverter circuit is used in driving an inductive load such as an induction motor. This configuration requires a freewheeling diode (hereinafter referred to also as the “FWD”) for recovering current generated due to counterelectromotive force of the inductive load. A normal inverter circuit is configured using a plurality of gate-insulated bipolar transistors (hereinafter referred to also as the “IGBTs”) and FWDs.

What is demanded of an inverter circuit is a reduction in size, weight, and cost. Therefore, desirably, a smaller number of IGBTs and FWDs are used in an inverter circuit. Under the circumstances, a reverse conducting IGBT (hereinafter referred to also as the “RC-IGBT”) in which an IGBT and an FWD are integrated is under development.

Use of the RC-IGBT is expected to reduce the area and cost of a circuit equipped with a semiconductor element. In a normal IGBT, at the main surface of the substrate, just a p-type collector layer is formed. In an RC-IGBT, at the main surface of the substrate, a p-type collector layer and an n-type cathode layer are formed.

In an RC-IGBT, an IGBT and an FWD are formed at one semiconductor substrate. Note that, in order to realize a reduction in cost, the IGBT and the FWD must be simultaneously formed.

Normally, from the viewpoint of the electric characteristic, in an individual semiconductor element, the density of the base layer in an IGBT is higher than the density of the anode layer in an FWD. In an RC-IGBT in which an IGBT and an FWD are integrated, the p+ base layer of the IGBT and the p+ anode layer of the FWD are desirably simultaneously formed. Here, when the density of the anode layer is set to be equivalent to that of the base layer, that is, higher than in the normal case, the recovery current of the FWD increases. On the other hand, when the density of the base layer is set to be equivalent to that of the anode layer, that is, lower than in the normal case, the ON voltage of the IGBT increases.

Addressing thereto, there exists the local lifetime control as a scheme of increasing the density of the anode layer so as to be equivalent to the density of the base layer, still minimizing an increase in the recovery current of the FWD. In the local lifetime control, just the FWD region is irradiated with light ions.

Japanese Patent Application Laid-Open No. 2017-092256 discloses a configuration for exerting the local lifetime control (hereinafter referred to also as the “related configuration A”). In the related configuration A, using a mask made of metal (aluminum), or a photoresist as a mask, an IGBT region is shielded. Then, just the FWD region is exposed. Thus, in the FWD region, a lifetime layer is formed.

In patterning, a photomask is positioned using a mark provided at a substrate. Note that, in general, as the thickness of a film resist bonded to a substrate is greater, it becomes difficult to check the mark. Accordingly, what is required is a configuration that allows the mark provided at the substrate to be checked irrespective of the thickness of the film resist. The related configuration A cannot meet the requirement.

An object of the present invention is to provide a film resist or the like having the configuration that allows a mark provided at a substrate to be checked irrespective of the thickness of the film resist.

A film resist according to one aspect of the present invention is a film resist having photosensitivity and for being bonded to a main surface of a substrate which main surface is provided with a mark. The film resist includes a cutout for the mark to be checked.

According to the present invention, a film resist is a member for being bonded to a main surface of a substrate which main surface is provided with a mark. The film resist is includes a cutout for the mark to be checked.

Thus, the present invention provides a film resist having the configuration that allows a mark provided at a substrate to be checked irrespective of the thickness of the film resist.

These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings.

FIGS. 1A and 1B are each an illustration for describing the configuration to a film resist according to a first preferred embodiment is applied;

FIG. 2 is an illustration showing a film roll;

FIG. 3 is an illustration for describing the configuration of the film resist;

FIG. 4 is a flowchart of a manufacturing method Pr according to the first preferred embodiment;

FIG. 5 is an illustration for describing a step of bonding a film resist to a film processing stage;

FIG. 6 is an illustration showing the state where the film resist is bonded to the film processing stage;

FIG. 7 is an illustration for describing a bonding step;

FIG. 8 is an illustration for describing an exposing step;

FIGS. 9A and 9B are each an illustration for describing a film resist according to a first variation;

FIGS. 10A and 10B are each an illustration for describing a film resist according to a second variation;

FIG. 11 is a flowchart of a manufacturing method Pra according to a second variation; and

FIGS. 12A and 12B are each an illustration for describing a film resist according to a third variation.

In the following, with reference to the drawings, a description will be given of a preferred embodiment of the present invention. In the drawings referred to in the following, identical constituents are denoted by an identical reference character. The name and function of the constituents denoted by an identical reference character are the same. Accordingly, part of the constituents denoted by an identical reference character may be omitted.

Note that, the dimension, material, and shape of each of the constituents illustrated in the preferred embodiment and the relative disposition of the constituents may be changed as appropriate depending on the configuration of an apparatus to which the present invention is applied, various conditions and the like. Further, the dimension of each of the constituents may not coincide with the actual dimension.

First Preferred Embodiment

FIGS. 1A and 1B are each an illustration for describing the configuration to which a film resist 10 according to a first preferred embodiment is applied. FIG. 1A is a plan view showing the configuration of the film resist 10 . FIG. 1B is a plan view showing the state where the film resist 10 is bonded to a main surface 5 s of a substrate 5 (hereinafter referred to also as the “bonded state”). The substrate 5 is, for example, a semiconductor substrate (a semiconductor wafer). The diameter of the substrate 5 is, for example, 8 inches.

In FIGS. 1A and 1B , the X direction, the Y direction, and the Z direction are perpendicular to one another. The X direction, the Y direction, and the Z direction shown in the subsequent drawings are also perpendicular to one another. In the following, a direction including the X direction and a direction opposite to the X direction (the −X direction) is referred to also as the “X-axis direction”. Further, hereinafter, a direction including the Y direction and a direction opposite to the Y direction (the −Y direction) is referred to also as the “Y-axis direction”. Further, hereinafter, a direction including the Z direction and a direction opposite to the Z direction (the −Z direction) is referred to also as the “Z-axis direction”.

Further, hereinafter, a plane including the X-axis direction and the Y-axis direction is referred to also as the “XY plane”. Further, hereinafter, a plane including the X-axis direction and the Z-axis direction is referred to also as “the XZ plane”. Further, hereinafter, a plane including the Y-axis direction and the Z-axis direction is referred to also as the “YZ plane”.

The film resist 10 is a dry film resist having photosensitivity. The film resist 10 is, as an example, a negative type film resist. The negative type film resist has the characteristic in that, the solubility of any exposed portion of the film resist reduces. The solubility refers to the degree of dissolving in a developer.

With reference to FIG. 1B , the shape of the substrate 5 as seen in a plan view (the XY plane) is, for example, a circle. At the main surface 5 s of the substrate 5 , a mark M 1 is provided. The mark M 1 is an alignment mark. The mark M 1 is used for positioning (aligning), in an exposing step which will be described later, the substrate 5 and a photomask MK 1 relative to each other which will be described later. The film resist 10 is a member for being bonded to the main surface 5 s of the substrate 5 . Hereinafter, an apparatus having the function of positioning the substrate and the photomask MK 1 relative to each other is referred to also as the “positioning apparatus”. The positioning apparatus has a camera for checking the mark M 1 of the substrate mounted on a stage, for example. The positioning apparatus functions to finely adjust the position of the stage based on image information obtained with the camera, so that the substrate and the photomask MK 1 establish a predetermined positional relationship.

With reference to FIGS. 1A and 1B , the film resist 10 includes a cutout V 1 corresponding to the mark M 1 provided at the substrate 5 . The cutout V 1 is required for the positioning apparatus to check (recognize) the mark M 1 . The shape of the cutout V 1 is, for example, sector-like. In the bonded state, the cutout V 1 excludes the mark M 1 from the film resist 10 .

Hereinafter, in the main surface 5 s of the substrate 5 , the region not used for forming the semiconductor element is referred to also as the “substrate ineffective region”. The substrate ineffective region is, for example, the region not irradiated with ultraviolet rays in the exposing step which will be described later. Note that, the mark M 1 is provided in the substrate ineffective region of the main surface 5 s of the substrate 5 .

Hereinafter, in the film resist, a region not used for processing for forming the semiconductor element and the like is referred to also as the “resist ineffective region”. The resist ineffective region of the film resist is a region overlaid on the substrate ineffective region of the substrate 5 in the bonded state. The resist ineffective region of the film resist is, for example, a region not irradiated with ultraviolet rays in the exposing step which will be described later.

The film resist 10 is provided with the cutout V 1 so as to exclude the whole substrate ineffective region including the mark M 1 from the film resist 10 in the bonded state. Therefore, the shape and size of the cutout V 1 shown in FIG. 1A are equivalent to those of the substrate ineffective region.

The film resist 10 is smaller in size than the main surface 5 s of the substrate 5 . Specifically, the size of the film resist 10 is set so that, as seen in a plan view (the XY plane), the entire film resist 10 is accommodated within the main surface 5 s , in other words, the outer portion in the substrate 5 is excluded from the film resist 10 by a certain width.

Hereinafter, the film resist 10 including a removal film 3 bonded thereto is referred to also as the “film resist 10 N”. The film resist 10 N is part of the film roll 10 Nr shown in FIG. 2 . The film roll 10 Nr is formed by the elongated film resist 10 N being rolled into a roll.

Next, a description will be given of the configuration of the film resist 10 N. FIG. 3 is an illustration for describing the configuration of the film resist 10 N. With reference to FIG. 3 , the film resist 10 N is, for example, a three-layer film. The film resist 10 N includes the film resist 10 and the removal film 3 .

The film resist 10 includes a photoresist 2 and a carrier film 4 . The photoresist 2 has a thickness of 50 μm or more. The photoresist 2 has surfaces 2 a , 2 b . To the surface 2 a of the photoresist 2 , the carrier film 4 is bonded. The surface 2 b is a surface to be bonded to the main surface 5 s of the substrate 5 . To the surface 2 b of the photoresist 2 , the removal film 3 is bonded. That is, the removal film 3 protects the surface 2 b of the photoresist 2 . Note that, before the film resist is bonded to the substrate 5 , the removal film 3 is removed from the photoresist 2 .

Further, the carrier film 4 is provided for protecting the photoresist 2 , and stays on the surface 2 a of the photoresist 2 from the bonding step which will be described later to the exposing step which will be described later. Note that, after the exposing step is performed, the carrier film 4 is removed from the photoresist 2 before a developing step.

Hereinafter, a method of manufacturing a semiconductor device using the film resist 10 is referred to also as the “manufacturing method Pr”. The manufacturing method Pr is the patterning.

Next, a description will be given of the manufacturing method Pr. FIG. 4 is a flowchart of the manufacturing method Pr according to the first preferred embodiment. FIG. 4 shows just the main steps included in the manufacturing method Pr.

In the manufacturing method Pr, firstly, the film resist 10 N is cut out from the film roll 10 Nr shown in FIG. 2 by a predetermined length.

Next, as shown in FIG. 5 , the film resist 10 N is bonded to the film processing stage St 1 (see FIG. 6 ). Hereinafter, the film resist 10 N being similar in shape to the film resist 10 shown in FIG. 1A is referred to also as the “film resist 10 Na”. The film resist 10 Na includes the film resist 10 and the removal film 3 shown in FIG. 1A . The film resist 10 Na is the film resist 10 including the removal film 3 bonded thereto. That is, what is obtained by removing the removal film 3 from the photoresist 2 of the film resist 10 Na is the film resist 10 shown in FIG. 1A .

A cut line CL 1 is shown in the film resist 10 N shown in FIG. 6 . The cut line CL 1 is a line for cutting out the film resist 10 Na from the film resist 10 N.

Next, a cutting step (S 110 ) is performed. In the cutting step, a cutting apparatus (not shown) having the function of cutting the film resist is used. In the cutting step, the cutting apparatus cuts along the cut line CL 1 of the film resist 10 N so that the film resist 10 Na is cut out from the film resist 10 N. The film resist 10 included in the film resist 10 Na is provided with the cutout V 1 . That is, in the cutting step, the cutting apparatus cuts the film resist 10 so that the cutout V 1 is formed at the film resist 10 included in the film resist 10 Na. That is, the cutting step is also a cutout forming step of forming the cutout V 1 at the film resist 10 N (the film resist 10 ).

Thus, the film resist 10 Na is acquired. Note that, the film resist 10 included in the acquired film resist 10 Na is smaller in size than the main surface 5 s of the substrate 5 . Further, the film resist 10 included in the film resist 10 Na is provided with the cutout V 1 .

Next, the removal film 3 is removed from the film resist 10 Na. Thus, the film resist 10 is obtained.

Next, a bonding step (S 120 ) is performed. In the bonding step, a bonding apparatus (not shown) having the function of bonding the film resist 10 to the substrate 5 is used. In the bonding step, as shown in FIG. 7 , the bonding apparatus bonds the film resist 10 to the main surface 5 s of the substrate 5 . Hereinafter, a region in the main surface 5 s being the target of the bonding the film resist is referred to also as the “target region”. In the bonding step, the film resist 10 is bonded within the target region of the main surface 5 s.

Next, an exposing step (S 130 ) is performed (see FIG. 8 ). In the exposing step, firstly, the positioning apparatus positions the substrate 5 and the photomask MK 1 relative to each other while checking the position of the mark M 1 . Specifically, the position of the substrate 5 is finely adjusted using the mark M 1 , so that the substrate and the photomask MK 1 attain a predetermined positional relationship as seen in a plan view (the XY plane). Then, the exposing is performed, that is, irradiating the film resist 10 with ultraviolet rays L 10 via the photomask MK 1 is performed.

Next, the carrier film 4 is removed from the photoresist 2 of the film resist 10 . Thereafter, a developing step or the like is performed. Thus, the manufacturing method Pr (the patterning) ends.

As has been described above, according to the present preferred embodiment, the film resist 10 is a member for being bonded to the main surface 5 s of the substrate 5 which main surface 5 s is provided with the mark M 1 . The film resist 10 includes the cutout V 1 for the mark M 1 to be checked.

This configuration implements a film resist that allows a mark provided at a substrate to be checked irrespective of the thickness of the film resist. Further, in positioning the substrate 5 and the photomask MK 1 relative to each other, this configuration allows the mark M 1 to be easily checked (visually recognized).

Further, in the present preferred embodiment, the cutout V 1 excludes the mark M 1 from the film resist 10 in the bonded state. Therefore, this configuration allows the mark M 1 at the substrate 5 to be easily visually recognized. Further, in the film resist 10 , the cutout V 1 is provided so as to exclude the entire substrate ineffective region including the mark M 1 from the film resist 10 in the bonded state. Therefore, the risk of a reduction in visibility of the mark M 1 is minimized also in the state where the film resist 10 is bonded to the main surface 5 s of the substrate 5 so as to slightly extend outside the target region.

Further, in the present preferred embodiment, the film resist 10 is smaller in size than the main surface 5 s of the substrate 5 . Specifically, the size of the film resist 10 is set so that the entire film resist 10 is accommodated within the main surface 5 s as seen in a plan view (the XY plane). Therefore, also in the case where developing or the like is performed in the bonded state, this configuration minimizes the risk of part of the photoresist remaining as a foreign object at the rim of the main surface 5 s of the substrate 5 .

Further, in the present preferred embodiment, the cutting step (S 110 ) is performed before the bonding step (S 120 ). That is, before the bonding step is performed, the cutout V 1 is formed at the film resist. Therefore, this configuration allows the mark M 1 to be easily visually recognized in the positioning the photomask MK 1 in the bonded state.

Note that, in the related configuration A, when just the FWD region is irradiated with light ions (for example, protons), the IGBT region must be prevented from being irradiated with the protons. Here, since the range of the protons in the photoresist is about 50 μm, the photoresist must have a thickness of 50 μm or more.

However, when patterning is performed on the substrate provided with the alignment mark using a photoresist having a thickness of 50 μm or more, the following problem arises. That is, the alignment mark is a mark for positioning the photomask relative to the substrate in the patterning using the photomask. Specifically, when the photoresist is covering the alignment mark when the patterning is performed using the photomask, there arises a problem that the alignment mark cannot be detected.

Note that, die photoresist is high in viscosity. Therefore, in forming a film by spin coating, the photoresist is formed with a greater thickness at the end of the wafer. Further, the photoresist may remain as a foreign object at a portion where the photoresist cannot be removed even by the edge rinse or back rinse process. Therefore, there exists a problem that, in the processes subsequent to the manufacturing method Pr, the yield may reduce due to the foreign object.

Here, the film resist 10 according to the present preferred embodiment is configured as described above. Therefore, the film resist 10 according to the present preferred embodiment and the manufacturing method Pr using the film resist 10 can solve the above-described problems.

<First Variation>

Hereinafter, the configuration of the first preferred embodiment is referred to also as the “configuration Ct 1 ”. Further, hereinafter, the configuration of the present variation is referred to also as the “configuration Ctm 1 ”. The configuration Ctm 1 is a configuration in which the size of the cutout V 1 is smaller. The configuration Ctm 1 is applied to the configuration Ct 1 (the first preferred embodiment).

FIGS. 9A and 9B are each an illustration for describing the film resist 10 according to the first variation. FIG. 9A is a plan view of the film resist 10 having the configuration Ctm 1 . FIG. 9B is a plan view of the film resist 10 in the bonded state.

With reference to FIGS. 9A and 9B , the film resist 10 having the configuration Ctm 1 is different from the film resist 10 shown in FIG. 1A in that the shape of the cutout V 1 is a circle and the size of the cutout V 1 is smaller. The rest of the configuration of the film resist 10 having the configuration Ctm 1 is similar to that of the film resist 10 shown in FIG. 1A and, therefore, a detailed description thereof is not repeated.

In the bonded state, the cutout V 1 excludes the mark M 1 from the film resist 10 . The size of the cutout V 1 is set to a minimum size just enough for the cutout V 1 to exclude the entire mark M 1 from the film resist 10 . That is, the size of the cutout V 1 is slightly greater than the mark M 1 . For example, the cutout V 1 is k times as great as the size of the mark M 1 . k is, for example, a real number falling within a range of 1.1 to 1.2 inclusive.

Hereinafter, the film resist 10 including no cutout V 1 is referred to also as the “film resist 10 n V”. The shape of the film resist 10 n V is, as an example, a circle (see FIG. 10A ). Hereinafter, an apparatus having the function of emitting laser light is referred to also as the “laser apparatus”.

In the manufacturing method Pr in the configuration Ctm 1 , a cutout forming step is performed between the cutting step (S 110 ) and the bonding step (S 120 ). Hereinafter, a brief description will be given of the manufacturing method Pr in the configuration Ctm 1 .

Firstly, similarly to the first preferred embodiment, the film resist 10 N is bonded to the film processing stage St 1 (see FIG. 6 ).

Next, in the cutting step (S 110 ), the cutting apparatus (not shown) cuts the film resist 10 N so as to cut out the film resist 10 n V from the film resist 10 N shown in FIG. 6 .

Next, the cutout forming step is performed. In the cutout forming step, the laser apparatus irradiates the film resist 10 n V with laser light so that the cutout V 1 is formed at the film resist 10 n V. Specifically, in the cutout forming step, the laser apparatus successively irradiates four locations in the film resist 10 n V with the laser light so that four cutouts V 1 shown in FIG. 9A are formed at the film resist 10 n V.

Thus, the carrier film 4 and the photoresist 2 existing at the four locations in the film resist 10 n V are removed. As a result, the film resist 10 shown in FIG. 9A is formed.

Thereafter, similarly to the first preferred embodiment, the bonding step (S 120 ) and the steps subsequent thereto are performed.

As has been described above, according to the present variation, the size of the cutout V 1 is the minimum size just enough for the cutout V 1 to exclude the entire mark M 1 from the film resist 10 in the bonded state. Therefore, this configuration reduces the processed amount of the film resist while maintaining the visibility of the mark M 1 .

Note that, the circular cutout V 1 is not limited to the configuration in which it is formed by using laser light. The cutout V 1 may be formed by cutting using a cutting apparatus. In such a configuration, in the cutout forming step, the cutting apparatus successively performs cutting (punching) at the four locations in the film resist 10 n V so that four cutouts V 1 shown in FIG. 9A are formed at the film resist 10 n V.

<Second Variation>

Hereinafter, the configuration of the present variation is referred to also as the “configuration Ctm 2 ”. The configuration Ctm 2 is a configuration in which, after the film resist is bonded to the substrate 5 , the cutout V 1 is formed at the film resist. The configuration Ctm 2 is applied to the configuration Ct 1 (the first preferred embodiment). Hereinafter, the state where the film resist 10 n V is bonded to the main surface 5 s of the substrate 5 is referred to also as the “bonded state”.

FIGS. 10A and 10B are each an illustration for describing the film resist according to the second variation. FIG. 10A is a plan view of the film resist 10 n V and the substrate 5 in the bonded state. FIG. 10B is an illustration showing the state where the cutout V 1 is formed at the film resist in the bonded state. The shape and size of the cutout V 1 in the configuration Ctm 2 is similar to the shape and size of the cutout V 1 in the configuration Ctm 1 .

Hereinafter, the manufacturing method Pr to which the configuration Ctm 2 is applied is referred to also as the “manufacturing method Pra”. FIG. 11 is a flowchart of the manufacturing method Pra according to the second variation. FIG. 11 shows just the main steps included in the manufacturing method Pra. In FIG. 11 , the steps denoted by step numbers identical to those in FIG. 4 are the processes similar to those described in the first preferred embodiment and, therefore, a detailed description thereof is not repeated. Hereinafter, a description will be mainly given of the difference from the first preferred embodiment.

In the manufacturing method Pra, in the cutting step A (S 110 A), the cutting apparatus (not shown) cuts the film resist 10 N so as to cut out the film resist 10 n V from the film resist 10 N shown in FIG. 6 .

Next, the bonding step (S 120 ) is performed. In the bonding step, the bonding apparatus bonds the film resist 10 n V to the main surface 5 s of the substrate 5 .

Next, the cutout forming step (S 122 A) is performed. In the cutout forming step, in the bonded state, the laser apparatus irradiates the film resist 10 n V with laser light so that the cutout V 1 is formed at the film resist 10 n V.

Hereinafter, in the main surface 5 s of the substrate 5 , the location (coordinates) where the mark M 1 exists is referred to also as the “location Lm”. In the configuration shown in FIG. 10A , four locations Lm exist. Specifically, in the cutout forming step (S 122 A), the laser apparatus successively irradiates the four locations Lm in the film resist 10 n V with laser light so that four cutouts V 1 shown in FIG. 10B are formed at the film resist 10 n V.

Thus, the carrier film 4 and the photoresist 2 existing at the four locations Lm in the film resist 10 n V are removed. As a result, the film resist 10 shown in FIG. 10B is formed.

Thereafter, similarly to the first preferred embodiment, the exposing step (S 130 ) and the steps subsequent thereto are performed.

As has been described above, according to the present variation, in the bonded state, each cutout V 1 is formed at the film resist. Note that, the size of such a cutout V 1 is the minimum size just enough for the cutout V 1 to exclude the entire mark M 1 from the film resist 10 in the bonded state. Therefore, this configuration reduces the processed amount of the film resist while maintaining the visibility of the mark M 1 .

<Third Variation>

Hereinafter, the configuration of the present variation is referred to also as the “configuration Ctm 3 ”. The configuration Ctm 3 is another configuration in which, after the film resist is bonded to the substrate 5 , the cutout V 1 is formed at the film resist. The configuration Ctm 3 is applied to the configuration Ct 1 (the first preferred embodiment).

FIGS. 12A and 12B are each an illustration for describing the film resist 10 according to a third variation. FIG. 12A is a plan view of the film resist 10 n V and the substrate 5 in the bonded state. FIG. 12B is an illustration showing the state where the cutout V 1 is formed at the film resist 10 in the bonded state. The shape and size of the cutout V 1 in the configuration Ctm 3 are identical to those of the cutout V 1 in the configuration Ct 1 .

In the configuration Ctm 3 , in the bonded state, the cutout V 1 is provided to the film resist 10 so as to exclude the entire substrate ineffective region including the mark M 1 from the film resist 10 . That is, in the bonded state, the cutout V 1 excludes the mark M 1 from the film resist 10 .

Next, a description will be given of the manufacturing method Pra to which the configuration Ctm 3 is applied. With reference to FIG. 11 , similarly to the second variation, in the manufacturing method Pra, the cutting step A (S 110 A) and the bonding step (S 120 ) are performed. Thus, the bonding apparatus bonds the film resist 10 n V to the main surface 5 s of the substrate 5 .

Next, the cutout forming step (S 122 A) is performed. In the cutout forming step, in the bonded state, the cutting apparatus cuts the film resist 10 n V so that the cutout V 1 shown in FIGS. 1A and 12B is formed at the film resist 10 n V. The cutting the film resist 10 n V is performed on the film resist 10 n V just by a depth corresponding to the thickness of the film resist 10 n V. As a result, the film resist 10 shown in FIG. 12B is formed.

Thereafter, similarly to the first preferred embodiment, the exposing step (S 130 ) and the steps subsequent thereto are performed.

As has been described above, the present variation exhibits the effect similarly to that the first preferred embodiment does. Further, in the bonded state, the cutout V 1 is provided to the film resist 10 so as to exclude the entire substrate ineffective region including the mark M 1 from the film resist 10 . Note that, the size of the cutout V 1 is fully greater than the size of the mark M 1 . Thus, also in the case where the film resist is bonded to the main surface 5 s of the substrate 5 so as to slightly extend outside the target region, the risk of a reduction in visibility of the mark M 1 is minimized.

Note that, within the scope of the present invention, the preferred embodiment and the variations can be freely combined, modified or omitted as appropriate.

For example, the shape of the cutout V 1 is not limited to sector-like or circular. The shape of the cutout V 1 may be, for example, the same as the shape of the mark M 1 (a quadrangle).

Further, for example, the shape of the mark M 1 is not limited to a quadrangle. The shape of the mark M 1 may be, for example, a circle.

Still further, for example, the shape of the film resist 10 is not limited to the shape of the film resist 10 shown in FIG. 1A or the shape of the film resist 10 shown in FIG. 9A , and may be in other shape.

Still further, for example, the number of the cutout V 1 formed at the film resist 10 is not limited to four. The cutout V 1 at the film resist 10 should be formed as many as the mark M 1 provided at the main surface 5 s of the substrate 5 . For example, when the number of the mark M 1 provided at the main surface 5 s of the substrate 5 is six, the number of the cutout V 1 formed at the film resist 10 is six.

Further, for example, while it has been described that the film resist 10 is a negative type film resist, the present invention is not limited thereto. The film resist 10 may be a positive type film resist.

While the invention has been shown and described in detail, the foregoing description is in all aspects illustrative and not restrictive. It is therefore understood that numerous modifications and variations can be devised without departing from the scope of the invention.