Method and apparatus for single chamber treatment

1. Field

The disclosure relates to a method, apparatus and system to provide single chamber treatment for dielectric surface modification and selective metal compound removal

2. Description of Related Art

Conventional semiconductor devices include a plurality of circuits which form an integrated circuit fabricated on a semiconductor substrate. A complex network of signal paths will normally be routed to connect the circuit elements distributed on the surface of the substrate. Efficient routing of these signals across the device requires formation of multilevel or multilayered schemes, such as, for example, single or dual damascene wiring structures. Within a typical interconnect structure, metal vias run perpendicular to the semiconductor substrate and metal lines run parallel to the semiconductor substrate.

As millions of devices and circuits are squeezed on a semiconductor substrate (or a chip), the wiring density and the number of metal levels are both increased generation after generation. In order to provide low RC for high signal speed, low k dielectric materials having a dielectric constant of less than silicon dioxide as well as copper-containing lines are becoming a necessity. The quality of thin metal wirings and studs formed by a conventional damascene process is extremely important to ensure yield and reliability. The major problem encountered in this area today is poor mechanical integrity of deep submicron metal studs embedded in low k dielectric materials, which can cause unsatisfied thermal cycling and stress migration resistance in interconnect structures. This problem becomes increasingly severe when either new metallization approaches or porous low k dielectric materials are used.

In one embodiment, the disclosure relates to a method, system and apparatus for single chamber treatment of a semiconductor device. In one embodiment, the single chamber may be used for dielectric surface modification and selective compound removal. An exemplary dielectric surface modification may modify one or more surface properties of the semiconductor device being constructed. For example, the surface properties may be modified from hydrophobic to hydrophilic, densify the dielectric layer and/or increase copper (Cu) diffusion barrier properties. The modified dielectric surface enables advanced thin film depositions (i.e., enhanced nucleation of ALD/CVD deposition as well as enhanced interfacial adhesion.

These and other embodiments of the disclosure will be discussed with reference to the following exemplary and non-limiting illustrations, in which like elements are numbered similarly, and where:

FIG. 1 schematically shows post dielectric patterning of a microchip according to one embodiment of the disclosure;

FIG. 2A illustrates the single chamber dielectric modification step according to one embodiment of the disclosure;

FIG. 2B illustrates the metal compound removal step in the same chamber as step 2 A; and

FIG. 3 illustrates the complete metallization with copper fillings and CMP.

In on embodiment, the disclosure relates to microchip processing that in a single chamber and at a single processing unit. The processing may include modifying the dielectric surface condition and selective removal of metal compounds from the microchip surface. Conventional methods implemented these steps in two different chambers which is time consuming, error prone and expensive. In one embodiment, the dielectric surface modification can result in changing the microchip surface from a hydrophobic to hydrophilic surface. The surface density may also be increased in this process. The surface compound may include Silicon (Si), Nitrogen (N 2 ), Ammonia (NH 3 ), Phosphorous (P), Boron (B), Oxygen (O 2 ) or other chemicals. Two process conditions may be included: thermal and direct plasma.

FIG. 1 schematically shows post dielectric patterning of a microchip according to one embodiment of the disclosure. Microchip 100 of FIG. 1 includes insulator layer 102 , conductor layer 110 , capping layer (interchangeably, diffusion insulator) 120 and patterned dielectric layer 130 . Layer 130 may comprise a low-k dielectric layer. Layer 120 may define a dielectric capping layer to prevent copper (Cu) 110 diffusion into the dielectric layer 130 . Conductor layer 110 may comprise Cu.

In one embodiment, the conductor material may be Cu. Cavity 107 was formed in layer 130 through conventional patterning process including both lithography and reactive ion etch. Cavity 107 is formed to provide space for another metal layer as shown below in order to provide an interconnect connection with the previous conductive layer 110 . Cavity 107 forms a via which exposes the conductor's surface. Liner 105 is disposed over insulator layer 102 to separate insulator layer 102 from the metal (interchangeably, conductor) layer 110 . The liner layer may comprise one or more metals, including, Ta, Ti, Ru, Co, W and their nitrides. The liner material may include alloys of these metals.

In one embodiment of the disclosure, the dielectric capping layer 120 may be of different material than the low-k dielectric material 130 . In another embodiment, the capping material may comprise SiN or SiC.

FIG. 2A illustrates the single chamber dielectric modification step according to one embodiment of the disclosure. Specifically, FIG. 2A shows an exemplary nitridation treatment in which layer 132 has been implemented over layer patterned dielectric layer 130 . The region 132 over patterned dielectric layer represents areas having had surface modification on the dielectric layer 130 .

The dielectric surface modification may be suitable to increase the surface density of the patterned dielectric layer 130 . It may also modify the surface properties of the treated area, and for simplicity the modified region on the surface of layer 130 is illustrated as a separate layer 132 . For example, the surface treatment may modify the dielectric layer surface of layer 130 from hydrophobic to hydrophilic. Layer 132 may comprise one or more of Si, NH x , N x , P, B and O x , alone or contained in chemicals. The modified dielectric surface enables advanced thin film depositions (i.e., enhanced nucleation of ALD/CVD deposition) and enhanced interfacial adhesion.

In one embodiment, the surface modification layer 132 may be formed under a first condition of thermal evaporation. In another embodiment, layer 132 may be formed under a second condition of direct plasma deposition. The performing electrical bias range is between about 100˜800 W, After dielectric surface modification, cavity (or via) 107 remains largely intact. Layer 132 extends through the bottom of the via, as shown schematically in region 109 .

FIG. 2B illustrates the metal compound removal step for the microchip of step 2 A. In one embodiment of the disclosure, steps shown in FIGS. 2A and 2B are implemented in the same chamber. In FIG. 2B , a portion of the region 109 (i.e., copper nitride, CuN x ) shown in FIG. 2A is removed from the bottom of cavity 107 . In an exemplary embodiment, the steps of surface modification and selective metal compound removal is done at the same chamber. Here, one or more of H 2 , He, or mixture of these material may be used for the selective removal. In one embodiment, the performing electrical bias used in the remote plasma treatment can be less than 100 W.

FIG. 3 illustrates the complete metallization with Cu fill and CMP. In FIG. 3 , modified dielectric surface layer 132 is shown to be adjacent to low-k dielectric layer 132 . Liner material 133 is formed over the dielectric layer 132 . Metal fill (e.g., Cu) is added to fill the via and form second metal layer (interconnect) 135 . The second metal layer may be the same as the first metal layer (e.g., Cu). Though not shown, additional layers may be added to cover the Cu fill layer 135 and dielectric layer 130 .

In one embodiment of the disclosure, the metallization is completed by filling via 135 with a conductive material (e.g., Cu) and by performing Chemical-Mechanical Polishing (CMP) after the filling operation. The CMP step removes excess Cu fill from the field area 135 .

While the principles of the disclosure have been illustrated in relation to the exemplary embodiments shown herein, the principles of the disclosure are not limited thereto and include any modification, variation or permutation thereof.