Encoder apparatus using liquid to suppress detection failure

This is a Divisional Application of U.S. patent application Ser. No. 12/726,023 filed Mar. 17, 2010 which in turn is a Continuation Application of International Patent Application No. PCT/JP2009/058414, filed on Apr. 28, 2009, which claims priority to Japanese Patent Application No. 2008-118443, filed on Apr. 30, 2008, and claims priority to and the benefit of U.S. Provisional Application No. 61/202,669, filed on Mar. 25, 2009. The contents of the aforementioned applications are incorporated herein by reference.

The present invention relates to an encoder apparatus.

As a position detection apparatus, encoder apparatuses as disclosed in, for example, the following patent documents are known.

Patent Document 1: Japanese Unexamined Patent Application, First Publication No. H05-133768

Patent Document 2: Japanese Unexamined Patent Application, First Publication No. H05-118873

Encoder apparatuses use a detector to detect a scale member on which a scale is arranged. If a surface state of the scale member is deteriorated by, for example, foreign matter being attached to the surface of the scale member, there is a possibility that a detection failure will occur.

Aspects of the present invention have an object to provide an encoder apparatus capable of suppressing an occurrence of a detection failure.

According to a first aspect of the present invention, there is provided an encoder apparatus including: a first scale member with a scale region including a scale; a detector that detects light from the scale region; a retaining member with a retaining surface that faces the scale region via a gap and retains a liquid at least between the retaining surface and the first scale member.

According to a second aspect of the present invention, there is provided an encoder apparatus including: a first scale member with a scale region including a scale; a detector that detects the scale of the scale region; and a liquid supply port that supplies a liquid so as to be in contact with a region on the first scale member including the scale region.

According to the aspects of the present invention, it is possible to suppress occurrence of a detection failure.

FIG. 1 is a perspective view showing a part of an encoder apparatus according to a first embodiment.

FIG. 2 is a side cross-sectional view showing the encoder apparatus according to the first embodiment.

FIG. 3 is a plan view showing a moving scale according to the first embodiment.

FIG. 4 is an enlarged side cross-sectional view showing a part of a moving scale and a retaining member according to the first embodiment.

FIG. 5 is an enlarged side cross-sectional view showing a part of a moving scale and a retaining member according to the first embodiment.

FIG. 6 is an enlarged side cross-sectional view showing a part of a moving scale and a retaining member according to the first embodiment.

FIG. 7A is a perspective view showing a part of an encoder apparatus according to a second embodiment.

FIG. 7B is a cross-sectional view of FIG. 7A taken through A-A as indicated by arrowheads.

FIG. 7C is a cross-sectional view of FIG. 7A taken through B-B as indicated by arrowheads.

FIG. 8 is a side cross-sectional view showing an encoder apparatus according to a third embodiment.

FIG. 9 is a side cross-sectional view showing an encoder apparatus according to a fourth embodiment.

FIG. 10 is a perspective view showing a part of an encoder apparatus according to a fifth embodiment.

FIG. 11 is a side cross-sectional view showing an encoder apparatus according to a sixth embodiment.

FIG. 12 is a perspective view of a retaining member according to the sixth embodiment, seen from below.

FIG. 13 is a side cross-sectional view showing an encoder apparatus according to the sixth embodiment.

FIG. 14 is a side cross-sectional view showing an encoder apparatus according to a seventh embodiment.

FIG. 15 is a side cross-sectional view showing an encoder apparatus according to an eighth embodiment.

FIG. 16 is a side cross-sectional view showing an encoder apparatus according to a ninth embodiment.

Hereunder is a description of embodiments of the present invention with reference to the drawings. However, the present invention is not limited to these. In the following description, an XYZ orthogonal coordinate system is established, and the positional relationship of respective members is described with reference to this XYZ orthogonal coordinate system. A predetermined direction within a horizontal plane is made the X axis direction, a direction orthogonal to the X axis direction in the horizontal plane is made the Y axis direction, and a direction orthogonal to both the X axis direction and the Y axis direction (that is, a vertical direction) is made the Z axis direction. Furthermore, rotation (inclination) directions around the X axis, the Y axis, and the Z axis are made the θX, the θY, and the θZ directions, respectively.

First Embodiment

A first embodiment will be described. FIG. 1 is a perspective view showing a part of an encoder apparatus 1 according to the first embodiment. FIG. 2 is a side cross-sectional view of the encoder apparatus 1 according to the first embodiment.

In FIG. 1 and FIG. 2 , the encoder apparatus 1 includes: a first scale member 4 with a scale region (a detection region) 3 on which a scale 2 is arranged; a detector 5 that detects light from the scale region 3 ; and a retaining member 7 with a retaining surface 6 that is arranged so as to face a surface of the first scale member 4 via a predetermined gap and retains a liquid LQ between itself and the first scale member 4 . Furthermore, the encoder apparatus 1 includes: a light source 8 that emits light; and an optical system 9 in which the light from the light source 8 is incident. In FIG. 1 , the illustration of the detector 5 , the light source 8 , and the optical system 9 is omitted. In the present embodiment, water is used as the liquid LQ.

The encoder apparatus 1 of the present embodiment is a rotary encoder. The first scale member 4 is a circular plate that rotates. The first scale member 4 is coupled to a rod 10 . The first scale member 4 rotates with the rod 10 as its axis of rotation. In the present embodiment, the axis of rotation of the first scale member 4 is substantially parallel to the Z axis.

The first scale member 4 moves with respect to the detector 5 . The position of the retaining member 7 is fixed with respect to the detector 5 . In the present embodiment, the retaining member 7 includes: a second scale member 11 that is different from the first scale member 4 ; a transmissive member 12 that allows light to be transmitted through; and a support member 13 that supports the second scale member 11 and the transmissive member 12 . In the following description, the first scale member 4 is appropriately referred to as the moving scale 4 , and second scale member 11 is appropriately referred to as the fixed scale 11 .

The moving scale 4 has: a transmissive member capable of transmitting light; and a scale (a scale pattern) 2 that is formed from a light-shielding material on the transmissive member. The fixed scale 11 has: a transmissive member capable of transmitting light; and a scale (a scale pattern) that is formed from a light-shielding material on the transmissive member. The transmissive members of the moving scale 4 and the fixed scale 11 are made of, for example, silica. The light-shielding members thereof are made of, for example, chromium. The support member 13 is made of a metal such as titanium.

The moving scale 4 is a plate member that has: a top surface 4 A; a bottom surface 4 B that faces in a direction opposite to a top surface 4 A; and a side surface 4 S that connects the top surface 4 A with the bottom surface 4 B. The top surface 4 A and the bottom surface 4 B of the moving scale 4 are substantially parallel to each other. That is, the moving scale 4 is a parallel flat plate. In the present embodiment, the top surface 4 A and the bottom surface 4 B are substantially parallel to the XY plane. In the present embodiment, the scale region 3 is arranged on a part of the top surface 4 A of the moving scale 4 . In the present embodiment, the scale region 3 is a ring-shaped region on a part of the top surface 4 A.

The retaining member 7 is a ring-shaped member. The retaining member 7 has a first portion 71 that faces at least a part of the top surface 4 A; a second portion 72 that faces at least a part of the bottom surface 4 B; and a third portion 73 that connects the first portion 71 with the second portion 72 and faces the side surface 4 S. The first portion 71 is arranged so as to face at least the scale region 3 .

In the present embodiment, the first portion 71 is composed of the fixed scale 11 and a part of the support member 13 . The second portion 72 is composed of the transmissive member 12 and a part of the support member 13 . The third portion 73 is composed of a part of the support member 13 .

In the present embodiment, the retaining member 7 retains the liquid LQ between itself and the moving scale 4 so that a local region on the surface of the moving scale 4 is in contact with the liquid LQ. The retaining member 7 retains the liquid LQ between itself and the moving scale 4 so that at least the scale region 3 is in contact with the liquid LQ.

In the present embodiment, the first portion 71 is formed in a ring shape so as to face the ring-shaped region on a part of the top surface 4 A including the scale region 3 . The second portion 72 is formed in a ring shape so as to face the ring-shaped region on a part of the bottom surface 4 B. The third portion 73 is formed in a ring shape so as to surround the side surface 4 S.

The retaining surface 6 includes: a bottom surface of the first portion 71 that faces the top surface 4 A; a top surface of the second portion 72 that faces the bottom surface 4 B; and a side surface of the third portion 73 that faces the side surface 4 S. In this manner, in the present embodiment, the retaining surface 6 is formed in a ring shape in accordance with the moving scale 4 .

The fixed scale 11 is a plate member that has: a top surface 11 A; and a bottom surface 11 B that faces in the direction opposite to the top surface 11 A. A scale of the fixed scale 11 is arranged on the bottom surface 11 B. The top surface 11 A and the bottom surface 11 B of the fixed scale 11 are substantially parallel to each other. That is, the fixed scale 11 is a parallel flat plate. In the present embodiment, the top surface 11 A and the bottom surface 11 B are substantially parallel to the XY plane. The bottom surface 11 B of the fixed scale 11 faces the top surface 4 A of the moving scale 4 . The fixed scale 11 is capable of retaining the liquid LQ between the bottom surface 11 B and the moving scale 4 . That is, in the present embodiment, the retaining surface 6 includes the bottom surface 11 B.

The transmissive member 12 is a plate member that has a top surface 12 A, and a bottom surface 12 B that faces in the direction opposite to the top surface 12 A. The top surface 12 A and the bottom surface 12 B of the transmissive member 12 are substantially parallel to each other. That is, the transmissive member 12 is a parallel flat plate. In the present embodiment, the top surface 12 A and the bottom surface 12 B are substantially parallel to the XY plane. The top surface 12 A of the transmissive member 12 faces the bottom surface 4 B of the moving scale 4 . The transmissive member 12 is capable of retaining the liquid LQ between the top surface 12 A and the moving scale 4 . That is, in the present embodiment, the retaining surface 6 includes the top surface 12 A.

In the present embodiment, the scale 2 of the moving scale 4 is a light-dark grating pattern (hereinafter referred to as the grating) formed on the top surface 4 A. The grating of the moving scale 4 is a one-dimensional grating whose periodic direction is along a rotation direction of the moving scale 4 (the θZ direction). In the present embodiment, the moving scale 4 is of transmissive type.

The fixed scale 11 is arranged above the moving scale 4 (on the +Z side). The fixed scale 11 is arranged at a position that faces the scale region 3 of the top surface 4 A. The scale of the fixed scale 11 is a light-dark grating pattern (hereinafter referred to as the grating) formed on the bottom surface 11 B. The grating of the fixed scale 11 is a one-dimensional grating whose periodic direction is along the θZ direction. In the present embodiment, the fixed scale 11 is of transmissive type.

The optical system 9 is arranged at a position facing the top surface 11 A of the fixed scale 11 . The optical system 9 is arranged between the light source 8 and the fixed scale 11 , and collimates light emitted from the light source 8 . The fixed scale 11 is arranged between the optical system 9 and the moving scale 4 . The light source 8 is, for example, an LED, and emits coherent light. The light emitted from the light source 8 is converted into parallel light by the optical system 9 , which are incident on the fixed scale 11 . The light incident on the fixed scale 11 is transmitted through (pass through) the fixed scale 11 and are irradiated onto the scale region 3 of the moving scale 4 .

As shown in FIG. 2 , in the present embodiment, the light source 8 and the optical system 9 are arranged in a space 15 formed by a housing 14 . The housing 14 forms the space 15 between itself and the retaining member 7 (the first portion 71 ).

The transmissive member 12 is arranged below the moving scale 4 (on the −Z side). The transmissive member 12 is arranged at a position that faces the bottom surface 4 B. The detector 5 is arranged at a position that faces the bottom surface 12 B of the transmissive member 12 . The transmissive member 12 is arranged between the moving scale 4 and the detector 5 .

FIG. 3 is a plan view showing the moving scale 4 . As shown in FIG. 3 , the scale region 3 is a ring-shaped region on a part of the top surface 4 A. The scale region 3 is lyophilic to the liquid LQ (has lyophilic property). The contact angle of the scale region 3 with respect to the liquid LQ is, for example, less than 90 degrees.

In the present embodiment, a lyophilic treatment is carried out to the moving scale 4 , to thereby provide (impart) lyophilic property (lyophilicity) to the scale region 3 . The lyophilic treatment includes, for example, a silane coupling treatment. In the present embodiment, a silane coupling treatment is carried out to the moving scale 4 on which the scale 2 is formed, to thereby form OH groups on a partial region (the scale region 3 ) of the surface (the top surface 4 A) of the moving scale 4 . Thus, lyophilic property is provided to the scale region 3 .

In the present embodiment, with respect to the radiation direction around the rotation center of the moving scale 4 , a first region 16 with lyophobic property to the liquid LQ is arranged external side of the scale region 3 , and a second region 17 with lyophobic property to the liquid LQ is arranged inner side of the scale region 3 . The first and second regions 16 , 17 are ring-shaped regions arranged on a part of the top surface 4 A. The contact angle of the first and second regions 16 , 17 with respect to the liquid LQ is, for example, not less than 90 degrees. Thus, in the present embodiment, the surrounding areas of the scale region 3 have lyophobic property (lyophobic) to the liquid LQ.

In the present embodiment, a lyophobic treatment is carried out to the moving scale 4 , to thereby provide lyophobic property to the first and second regions 16 , 17 . The lyophobic treatment includes, for example, a treatment of forming lyophobic films on the moving scale 4 . The lyophobic film includes, for example, an amorphous fluorine resin (hydrofluoroether). In the present embodiment, the lyophobic film is formed of “Cytop” manufactured by Asahi Glass Co., Ltd. The lyophobic films can be formed on the moving scale 4 by a predetermined coating method such as spin coating. Note that the lyophobic films can be formed on the moving scale 4 by a wet process such as dipping. In the present embodiment, the lyophobic property is provided to the first and second regions 16 , 17 by forming the lyophobic films including fluorine on partial regions (the first and second regions 16 , 17 ) of the surface (the top surface 4 A) of the moving scale 4 on which the scale 2 is formed.

In the example shown in FIG. 3 , with respect to the radiation direction around the rotation center of the moving scale 4 , a partial external side of the scale 2 and a partial inner side of the scale 2 are arranged in the first and second regions (lyophobic regions) 16 , 17 .

FIG. 4 is an enlarged side cross-sectional view of a part of the moving scale 4 and the retaining member 7 . As shown in FIG. 4 , the retaining surface 6 of the retaining member 7 includes a first surface 18 that faces the moving scale 4 via a first gap G 1 , and a second surface 19 that faces the moving scale 4 via a second gap G 2 which is smaller than the first gap G 1 . In the present embodiment, the first surface 18 and the second surface 19 are arranged on both the first portion 71 and the second portion 72 respectively. The first surface 18 of the first portion 71 faces the top surface 4 A via the first gap G 1 . The second surface 19 of the first portion 71 faces the top surface 4 A via the second gap G 2 . The first surface 18 of the second portion 72 faces the bottom surface 4 B via the first gap G 1 . The second surface 19 of the second portion 72 faces the bottom surface 4 B via the second gap G 2 .

In the present embodiment, at least a part of the second surface 19 of the first portion 71 faces an external region of the scale region 3 . In the present embodiment, at least a part of the second surface 19 faces the second region 17 that is lyophobic to the liquid LQ. In addition, in the present embodiment, a partial region of the bottom surface 4 B that faces the second surface 19 of the second portion 72 is also lyophobic to the liquid LQ.

Furthermore, in the present embodiment, the second surfaces 19 are lyophilic to the liquid LQ. The contact angle of the second surface 19 with respect to the liquid LQ is less than 90 degrees. A lyophilic treatment such as a silane coupling treatment is carried out to the second surfaces 19 , to thereby provide lyophilic property to the second surfaces 19 .

At least a part of the first surface 18 faces the scale region 3 . The first surfaces 18 are lyophilic to the liquid LQ. The contact angle of the first surface 18 with respect to the liquid LQ is less than 90 degrees. A lyophilic treatment such as a silane coupling treatment is carried out to the first surfaces 18 , to thereby provide lyophilic property to the first surfaces 18 . In the present embodiment, the first surface 18 includes the bottom surface 11 B of the fixed scale 11 and the top surface 12 A of the transmissive member 12 .

In the present embodiment, the second surfaces 19 are substantially parallel to the XY plane. Within the XY plane, the second surface 19 has a ring shape. The second surfaces 19 are arranged at inner circumferential edges of the retaining surface 6 so as to face the moving scale 4 .

Next is a description of an example of an operation of the encoder apparatus 1 with the aforementioned construction.

Between the retaining member 7 and the moving scale 4 , the liquid LQ is retained. The liquid LQ is retained between the retaining member 7 and the moving scale 4 so as to be in contact with a partial region of the top surface 4 A, a partial region of the bottom surface 4 B, and the side surface 4 S of the moving scale 4 including the scale region 3 . Furthermore, the liquid LQ is retained between the retaining member 7 and the moving scale 4 so as to be in contacted with the retaining surface 6 of the retaining member 7 including the bottom surface 11 B of the fixed scale 11 and the top surface 12 A of the transmissive member 12 . With the liquid LQ retained between the moving scale 4 and the retaining member 7 , an internal space 20 formed between the moving scale 4 and the retaining member 7 is filled with the liquid LQ.

In a state with the internal space 20 being filled with the liquid LQ, light is emitted from the light source 8 . The light emitted from the light source 8 is incident on the fixed scale 11 via the optical system 9 . The light being transmitted through the fixed scale 11 is incident on the scale region 3 of the moving scale 4 via the liquid LQ. The light incident on the scale region 3 of the moving scale 4 is transmitted through the moving scale 4 , and is then incident on the transmissive member 12 via the liquid LQ. The light incident on the transmissive member 12 is transmitted through the transmissive member 12 , and is then incident on the detector 5 . The detector 5 detects the light from the scale region 3 of the moving scale 4 via the transmissive member 12 and the liquid LQ. In this manner, in the present embodiment, the detector 5 detects the light, which has transmitted through the moving scale 4 , via the liquid LQ.

In the present embodiment, the light from the light source 8 is irradiated onto the fixed scale 11 via the optical system 9 . The light being transmitted through the fixed scale 11 has a light-dark pattern. As is well known, if the scale pitch is fine, diffraction occurs. However, the scale pitch (for example, 0.2 mm) in the present embodiment is sufficiently large for the wavelength of light (for example, 850 nm). This makes diffraction substantially negligible.

The light being transmitted through the fixed scale 11 is incident on the moving scale 4 with a pitch identical to that of the fixed scale 11 , allowing only the light (the amount of light) that has transmitted through the moving scale 4 to be incident on the detector 5 .

In the encoder apparatus 1 with the aforementioned construction, the movement (rotation) of the moving scale 4 changes the positional relationship between the fixed scale 11 and the moving scale 4 . Accordingly, the amount of light detected by the detector 5 changes periodically. With the detection of the change in the amount of light, the position information on the moving scale 4 in its rotational direction can be measured.

In the present embodiment, the liquid LQ is retained between the moving scale 4 and the retaining member 7 . This suppresses attachment of foreign matter to the surface of the moving scale 4 . In the present embodiment, the liquid LQ is retained between the moving scale 4 and the retaining member 7 , and the internal space 20 formed between the moving scale 4 and the retaining member 7 is filled with the liquid LQ. The liquid LQ in the internal space 20 is always kept in contact with the surface of the moving scale 4 (that includes a part of the top surface 4 A including the scale region 3 ; a part of the bottom surface 4 B; and the side surface 4 S). This suppresses attachment of foreign matter to the surface of the moving scale 4 .

In the present embodiment, the moving scale 4 and the retaining member 7 face each other via the gaps. That is, the moving scale 4 is spaced (separated) from the retaining member 7 . This makes the moving scale 4 smoothly movable (rotatable) with respect to the retaining member 7 . In the present embodiment, openings 21 are formed between the moving scale 4 and the retaining member 7 . The openings 21 are filled with (occupied by) the liquid LQ. This suppresses intrusion of foreign matter from an external space into the internal space 20 via the openings 21 . Even if foreign matter has intruded into the internal space 20 , attachment of the foreign matter to the surface of the moving scale 4 is suppressed by the liquid LQ in the internal space 20 .

As described above, according to the present embodiment, the retaining member 7 with the retaining surface 6 that retains the liquid LQ between itself and the moving scale 4 is established. Therefore, it is possible to suppress attachment of foreign matter to the surface of the moving scale 4 . In the present embodiment, the liquid LQ is retained so as to be contact with at least the scale region 3 of the surface of the moving scale 4 . Therefore, it is possible to suppress attachment of foreign matter to the scale region 3 . Furthermore, according to the present embodiment, the liquid LQ is kept in contact also with the bottom surface 11 B of the fixed scale 11 and the top surface 12 A of the transmissive member 12 . This suppresses attachment of foreign matter to the bottom surface 11 B and the top surface 12 A. Therefore, it is possible to suppress occurrence of a detection failure.

According to the present embodiment, the retaining member 7 retains the liquid LQ between itself and the moving scale 4 so that the liquid LQ is in contact with a local region on the surface of the moving scale 4 including the scale region 3 . This allows for smooth movement (rotation) of the moving scale 4 . For example, the viscous resistance of the liquid LQ that acts on the moving scale 4 can be made lower, and hence, the moving scale 4 can be moved (rotated) more smoothly when the moving scale 4 is moved (rotated) in a state with a partial region (a local region) on the surface of the moving scale 4 being in contact with the liquid LQ than when the moving scale 4 is moved (rotated) in a state with the whole region on the surface of the moving scale 4 being in contact with the liquid LQ.

According to the present embodiment, the retaining surface 6 has a ring shape in accordance with the shape of the scale region 3 . Therefore, the scale region 3 is allowed to be always kept in contact with the liquid LQ. This suppresses attachment of foreign matter to the scale region 3 .

According to the present embodiment, the scale region 3 is lyophilic to the liquid LQ. Hence, the scale region 3 is capable of being in close contact with the liquid LQ. Accordingly, attachment of, for example, bubbles or the like to the scale region 3 can be suppressed. Therefore, it is possible to suppress occurrence of a detection failure.

According to the present embodiment, the first and second regions 16 , 17 external side of the scale region 3 are lyophobic to the liquid LQ. This can suppresses flowing out of the liquid LQ that is retained between the moving scale 4 and the retaining member 7 into the external space. Furthermore, in the present embodiment, between the second surface 19 arranged at an inner circumferential edge of the retaining surface 6 and the second region 17 that is lyophobic to the liquid LQ, an interface (a meniscus) of the liquid LQ in the internal space 20 is formed. This suppresses flowing out of the liquid LQ in the internal space 20 into the external space.

In the present embodiment, the retaining surface 6 includes the first surface 18 that faces the top surface 4 A (the bottom surface 4 B) of the moving scale 4 via the first gap G 1 ; and the second surface 19 that faces the top surface 4 A (the bottom surface 4 B) via the second gap G 2 . With the second gap G 2 set to a predetermined size (for example, approximately 0.1 to 2 mm), flowing out of the liquid LQ in the internal space 20 into the external space is suppressed by the surface tension of the liquid LQ. Furthermore, because the first surfaces 18 are spaced (separated) from the moving scale 4 , it is possible to enlarge the internal space 20 filled with the liquid LQ.

In the aforementioned first embodiment, the description has been for the case where the surface of the moving scale 4 that faces the second surfaces 19 is lyophobic to the liquid LQ, by way of example. However, the surface of the moving scale 4 may be has lyophilic property.

Note that, as shown in FIG. 5 , on each of the top surface 4 A and the bottom surface 4 B of the moving scale 4 , a protrusion portion 22 that protrudes toward the retaining surface 6 may be provided. The protrusion portions 22 are arranged at a position that faces the second surfaces 19 along (of) the circumferential edges of the retaining surface 6 . In the example shown in FIG. 5 , the top surface of the protrusion portion 22 that faces the second surface 19 of the first portion 71 is a flat surface, and is substantially parallel to the second surface 19 . Similarly, the bottom surface of the protrusion portion 22 that faces the second surface 19 of the second portion 72 is a flat surface, and is substantially parallel to the second surface 19 . With the moving scale 4 provided with the protrusion portions 22 protruding toward the retaining surface 6 at a position that faces the second surfaces 19 of the circumferential edges of the retaining surface 6 , it is possible to suppress flowing out of the liquid LQ in the internal space 20 into the external space.

Note that, as shown in FIG. 6 , the top surface (the bottom surface) of the protrusion portion 22 B that faces the retaining surface 6 may be inclined (sloped) so as to be gradually closer to the retaining surface 6 in the direction from the center of the retaining surface 6 to the external side thereof, in other words, in the direction from the internal space 20 to the external space (the openings 21 ). Furthermore, the second surfaces 19 along the inner circumferential edges of the retaining surface 6 may be inclined so as to be gradually closer to the moving scale 4 in the direction from the center of the retaining surface 6 to the external side thereof (in the direction from the internal space 20 to the external space). In the example shown in FIG. 6 , the first surfaces 18 are substantially parallel to the scale region 3 . Each second surface 19 is inclined with respect to each first surface 18 . Also with this construction, it is possible to suppress flowing out of the liquid LQ in the internal space 20 into the external space.

Second Embodiment

Next is a description of a second embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 7A is a perspective view showing a part of an encoder apparatus 1 B according to the second embodiment. FIG. 7B is a cross-sectional view of FIG. 7A taken through A-A as indicated by arrowheads. FIG. 7C is a cross-sectional view of FIG. 7A taken through B-B as indicated by arrowheads.

As shown in FIG. 7A through FIG. 7C , the encoder apparatus 1 B according to the present embodiment includes a retaining member 7 B that retains a liquid LQ between itself and a moving scale 4 . Within the XY plane, the retaining member 7 B is an arcuate member (circular arc member). The retaining member 7 B has a retaining surface 6 B that retains the liquid LQ between itself and the moving scale 4 . The retaining surface 6 B includes first surfaces 18 B that face the moving scale 4 each via a first gap G 1 , and second surfaces 19 B that face the moving scale 4 each via a second gap G 2 . Within the XY plane, each second surface 19 B is arranged on a part around each first surface 18 B. In the present embodiment, the retaining member 7 B retains the liquid LQ between itself and a part of the scale region 3 in the θZ direction.

According to the present embodiment, the amount of the liquid LQ retained between the retaining member 7 B and the moving scale 4 is small. Therefore, it is possible to make the viscous resistance of the liquid LQ that acts on the moving scale 4 low. Hence, it is possible to smoothly move (rotate) the moving scale 4 .

Third Embodiment

Next is a description of a third embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 8 is a side cross-sectional view showing one example of an encoder apparatus 1 C according to the third embodiment. In the present embodiment, the encoder apparatus 1 C has a reflective-type moving scale 4 C. A scale 2 (a scale region 3 ) is arranged on a top surface 4 A of a moving scale 4 C.

In the present embodiment, a retaining member 7 C faces the top surface 4 A of the moving scale 4 C. The retaining member 7 C includes a fixed scale 11 C, and a support member 13 C that supports the fixed scale 11 C. The retaining member 7 C has a retaining surface 6 C that retains a liquid LQ between itself and the top surface 4 A of the moving scale 4 C. The retaining surface 6 C includes a first surface 18 C, and second surfaces 19 C that are closer to the top surface 4 A than the first surface 18 C. Within the XY plane, the retaining surface 6 C has a ring shape. In the present embodiment, the second surfaces 19 C are arranged in a ring shape each on the inner side and the external side of the first surface 18 C with respect to the radiation direction around the center of the retaining member 7 C.

A light source 8 is arranged at a position that faces the top surface 11 A of the fixed scale 11 C. In the present embodiment, a detector 5 is arranged also at a position that faces the top surface 11 A of the fixed scale 11 C. The fixed scale 11 C is arranged between the detector 5 and the moving scale 4 C.

Next is a description of an example of an operation of the encoder apparatus 1 C with the aforementioned construction. Light is emitted from the light source 8 in a state with the liquid LQ being retained between the retaining surface 6 C of the retaining member 7 C and the top surface 4 A of the moving scale 4 C. The light emitted from the light source 8 is incident on the scale region 3 of the moving scale 4 C via the fixed scale 11 C and the liquid LQ. The light incident on the scale region 3 of the moving scale 4 C is reflected off the moving scale 4 C, and is then incident on the detector 5 via the liquid LQ and the fixed scale 11 C. The detector 5 detects the light from the scale region 3 of the moving scale 4 C via the fixed scale 11 C and the liquid LQ. In this manner, in the present embodiment, the detector 5 detects the light, which has been reflected off the moving scale 4 C, via the liquid LQ.

Also in the present embodiment, it is possible to suppress attachment of foreign matter to the scale region 3 , and to thereby suppress occurrence of a detection failure.

Fourth Embodiment

Next is a description of a fourth embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 9 is a side cross-sectional view of one example of an encoder apparatus 1 D according to the fourth embodiment. The encoder apparatus 1 D includes a reflective-type moving scale 4 D. As shown in FIG. 9 , a scale region 3 is arranged on a side surface 4 S of the moving scale 4 D. A retaining member 7 D includes a fixed scale 11 D arranged at a position that faces the side surface 4 S of the moving scale 4 D, and a support member 13 D that supports the fixed scale 11 D. The retaining member 7 D retains a liquid LQ between itself and the side surface 4 S of the moving scale 4 D. The retaining member 7 D has a ring shape, and is arranged so as to surround the moving scale 4 D. A light source 8 and a detector 5 are arranged at positions that face the fixed scale 11 D. Light emitted from the light source 8 is incident on the scale region 3 on the side surface 4 S of the moving scale 4 D via the fixed scale 11 D and the liquid LQ. The light incident on the scale region 3 of the moving scale 4 D is reflected off the moving scale 4 D, and is then incident on the detector 5 via the liquid LQ and the fixed scale 11 D. The detector 5 detects the light from the scale region 3 of the moving scale 4 D via the fixed scale 11 D and the liquid LQ. Also in the present embodiment, it is possible to suppress attachment of foreign matter to the scale region 3 . Thereby it is possible to suppress occurrence of a detection failure.

Fifth Embodiment

Next is a description of a fifth embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 10 is a perspective view showing a part of an encoder apparatus 1 E according to the fifth embodiment. The encoder apparatus 1 E of the present embodiment is a linear encoder. The encoder apparatus 1 E includes a moving scale 4 E, and a retaining member 7 E that retains a liquid LQ between itself and the moving scale 4 E. The moving scale 4 E is a rectangular plate that travels in a straight line in the Y axis direction. In the present embodiment, the moving scale 4 E is of transmissive type. A scale 2 E (a scale region 3 E) is arranged on a top surface 4 A of the moving scale 4 E.

The scale region 3 E is long in the Y axis direction. That is, the scale region 3 E has a long axis (long shaft) along the Y axis direction. Furthermore, on the top surface 4 A of the moving scale 4 E, a first region 16 E that is lyophobic to the liquid LQ is arranged on the +X side of the scale region 3 , and a second region 17 E that is lyophobic to the liquid LQ is arranged on the −X side. The first and second regions 16 E, 17 E are long in the Y axis direction (have a long axis along the Y axis direction), In this manner, in the present embodiment, the area around the scale region 3 E is lyophobic to the liquid LQ.

The retaining member 7 E retains the liquid LQ between itself and the moving scale 4 E so that a local region on the surface of the moving scale 4 E is in contact with the liquid LQ. The retaining member 7 E includes a fixed scale 11 E; a transmissive member 12 E; and a support member 13 E that supports the fixed scale 11 E and the transmissive member 12 E. The fixed scale 11 E is arranged at a position that faces the top surface 4 A of the moving scale 4 E on which the scale region 3 E is arranged. The transmissive member 12 E is arranged at a position that faces a bottom surface 4 B of the moving scale 4 E. Light from a light source is irradiated onto the top surface 11 A of the fixed scale 11 E. The light being transmitted through the fixed scale 11 E is incident on the scale region 3 E of the moving scale 4 E via the liquid LQ. The light incident on the scale region 3 E of the moving scale 4 E is transmitted through the moving scale 4 E, is then emitted from the bottom surface 4 B, and is then incident on the transmissive member 12 E via the liquid LQ. The light incident on the transmissive member 12 E is transmitted through the transmissive member 12 E, and is then incident on a detector.

Also in the present embodiment, it is possible to suppress attachment of foreign matter to the scale region 3 E, and to thereby suppress occurrence of a detection failure.

Sixth Embodiment

Next is a description of a sixth embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 11 is a side cross-sectional view showing an encoder apparatus 1 F according to the sixth embodiment. The encoder apparatus 1 F is a linear encoder. The encoder apparatus 1 F includes a moving scale 4 F that travels in a line in the Y axis direction, and a retaining member 7 F that retains a liquid LQ between itself and the moving scale 4 F. In the present embodiment, the moving scale 4 F is of reflective type. Its top surface 4 A has a scale 2 F (a scale region 3 F). The retaining member 7 F faces the top surface 4 A of the moving scale 4 F.

FIG. 12 is a perspective view of the retaining member 7 F seen from the −Z side. In FIG. 11 and FIG. 12 , the retaining member 7 F includes a fixed scale 11 F, and a support member 13 F that supports the fixed scale 11 F. The retaining member 7 F has a retaining surface 6 F that retains the liquid LQ between itself and the top surface 4 A of the moving scale 4 F. The retaining surface 6 F includes a first surface 18 F, and a second surface 19 F that is closer to the top surface 4 A than the first surface 18 F. The first surface 18 F includes a bottom surface 11 B of the fixed scale 11 F. The second surface 19 F is arranged around the first surface 18 F.

A light source 8 and a detector 5 are arranged at positions that face the top surface 11 A of the fixed scale 11 F. In the present embodiment, the light source 8 and the detector 5 are arranged in an internal space 15 F of the retaining member 7 F. Light is emitted from the light source 8 in a state with the liquid LQ being retained between the retaining surface 6 F of the retaining member 7 F and the top surface 4 A of the moving scale 4 F. The light emitted from the light source 8 is incident on the scale region 3 F of the moving scale 4 F via the fixed scale 11 F and the liquid LQ. The light incident on the scale region 3 F of the moving scale 4 F is reflected off the moving scale 4 F, and is then incident on the detector 5 via the liquid LQ and the fixed scale 11 F. Also in the present embodiment, it is possible to suppress attachment of foreign matter to the scale region 3 F, and to thereby suppress occurrence of a detection failure.

Note that, as shown in FIG. 13 , retaining members 171 may be added to the retaining member 7 F. The retaining member 171 is, for example, a stainless-steel belt, and has a retaining surface 173 that is long in the Y axis direction in accordance with the top surface 4 A of the moving scale 4 F that is long in the Y axis direction. One end of each retaining member 171 is connected to the retaining member 7 F, and the other end thereof is connected to a winder mechanism 172 . The size of the retaining surface 173 is adjusted by the retaining member 171 being wound and unwound by the winder mechanism 172 . In the example shown in FIG. 13 , the liquid LQ is allowed to be in contact with a wide range of the top surface 4 A, making it possible to suppress attachment of foreign matter to the top surface 4 A.

Seventh Embodiment

Next is a description of a seventh embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 14 is a side cross-sectional view showing an encoder apparatus 1 G according to the seventh embodiment. The encoder apparatus 1 G includes a moving scale 4 F that travels in a line in the Y axis direction, and a retaining member 7 G that retains a liquid LQ between itself and the moving scale 4 F. The retaining member 7 G includes a fixed scale 11 G, and a support member 13 G that supports the fixed scale 11 G. The retaining member 7 G has a retaining surface 6 G that retains a liquid LQ between itself and the top surface 4 A of the moving scale 4 F. The retaining surface 6 G includes a first surface 18 G and a second surface 19 G that is closer to the top surface 4 A than the first surface 180 . The first surface 18 G includes a bottom surface 11 B of the fixed scale 11 G. The second surface 19 G is arranged around the first surface 18 G.

In the present embodiment, the encoder apparatus 1 G is provided with a liquid supply port 31 that supplies the liquid LQ so as to be in contact with the top surface 4 A of the moving scale 4 F including the scale region 3 F. The liquid supply port 31 supplies the liquid LQ between the moving scale 4 F and the retaining member 7 G. The liquid supply port 31 is arranged at a position that can face the scale region 3 F. In the present embodiment, the liquid supply port 31 is arranged in the retaining surface 6 G.

In addition, the encoder apparatus 1 G is provided with a liquid collection port 32 that collects the liquid LQ. The liquid collection port 32 collects the liquid LQ on the moving scale 4 F that faces the retaining surface 6 G. The liquid collection port 32 is arranged at a position that can face the scale region 3 F. In the present embodiment, the liquid collection port 32 is arranged in the retaining surface 6 G.

The liquid supply port 31 is connected to a liquid supply device 33 capable of supplying the liquid LQ. The liquid supply device 33 includes a filter unit for removing foreign matter in the liquid LQ to be supplied. The liquid supply device 33 can supply a clean liquid LQ via the filter unit. The liquid collection port 32 is connected to a liquid collection device 34 capable of collecting the liquid LQ. The liquid collection device 34 includes a vacuum system. Note that the liquid LQ having been collected by the liquid collection device 34 may be returned to the liquid supply device 33 . In the present embodiment, at least a part of each of the liquid supply device 33 and the liquid collection device 34 is arranged in an internal space 15 G of the retaining member 7 G. Furthermore, in the internal space 15 G, there are arranged a light source 8 and a detector 5 . The light source 8 and the detector 5 are arranged at positions that face the top surface 11 A of the fixed scale 11 G.

Next is a description of an example of an operation of the encoder apparatus 1 G. In a state with the retaining surface 6 G and the top surface 4 A facing each other, the liquid supply device 33 is activated to supply the liquid LQ from the liquid supply port 31 . The liquid LQ supplied from the liquid supply port 31 is retained between the retaining member 7 G and the moving scale 4 F. In the present embodiment, the liquid collection device 34 is activated concurrently with (in synchronization with; or in parallel with) the activation of the liquid supply device 33 . That is, in the present embodiment, the liquid collection operation of the liquid collection port 32 is carried out concurrently with (in synchronization with; or in parallel with) the liquid supply operation of the liquid supply port 31 . As a result, the liquid LQ is retained between the retaining member 7 G and the moving scale 4 F so that the liquid LQ is in contact with a local region of the top surface 4 A of the moving scale 4 F including the scale region 3 F.

Light is emitted from the light source 8 in a state with the liquid LQ being retained between the retaining surface 6 G of the retaining member 7 G and the top surface 4 A of the moving scale 4 F. The light emitted from the light source 8 is incident on the scale region 3 F of the moving scale 4 F via the fixed scale 11 G and the liquid LQ. The light incident on the scale region 3 F of the moving scale 4 F is reflected off the moving scale 4 F, and is then incident on the detector 5 via the liquid LQ and the fixed scale 11 G.

In the present embodiment, the liquid LQ is supplied from the liquid supply port 31 during the detection operation of the detector 5 . In addition, during the detection operation of the detector 5 , the liquid collection operation of the liquid collection port 32 is carried out concurrently with (in synchronization with; or in parallel with) the liquid supply operation of the liquid supply port 31 . Also in the present embodiment, it is possible to suppress attachment of foreign matter to the scale region 3 F, and to thereby suppress occurrence of a detection failure.

With the liquid collection operation of the liquid collection port 32 being carried out concurrently with (in synchronization with; or in parallel with) the liquid supply operation of the liquid supply port 31 , it is possible to clean at least one of the top surface 4 A of the moving scale 4 F and the retaining surface 6 G of the retaining member 7 G. For example, even if foreign matter has attached to the top surface 4 A of the moving scale 4 F, the foreign matter is collected together with the liquid LQ by the liquid collection port 32 when the liquid collection operation of the liquid collection port 32 is carried out concurrently with (in synchronization with; or in parallel with) the liquid supply operation of the liquid supply port 31 .

Furthermore, to clean at least one of the top surface 4 A of the moving scale 4 F and the retaining surface 6 G of the retaining member 7 G, the liquid LQ may be supplied from the liquid supply port 31 , or the liquid collection operation of the liquid collection port 32 may be carried out concurrently with (in synchronization with; or in parallel with) the liquid supply operation of the liquid supply port 31 . For example, during the halt (stop) of the detection operation by use of the detector 5 , the liquid collection operation of the liquid collection port 32 is carried out concurrently with (in synchronization with; or in parallel with) the liquid supply operation of the liquid supply port 31 . Thereby, it is possible to clean (maintain) at least one of the top surface 4 A of the moving scale 4 F and the retaining surface 6 G of the retaining member 7 G.

Note that, in the rotary-encoder-type encoder apparatuses 1 , 1 B, 1 C, and 1 D as described respectively in the aforementioned first to fourth embodiments, there may be provided a liquid supply port 31 , and additionally, a liquid collection port 32 .

In the aforementioned first to seventh embodiments, the descriptions have been for the case where light transmissive water is used as the liquid LQ, by way of example. However, liquid other than water can be used so long as it has a viscosity low enough not to prevent the movement (rotation) of the moving scale. For example, as the liquid LQ, anisole (C 7 H 8 O), cedar oil, glycerin, or the like can be used.

In the aforementioned embodiments, the descriptions have been for the case where the liquid LQ is retained between the moving scale and the retaining member, by way of example. However, the liquid LQ may be retained between the moving scale and the detector. In that case, for example if the fixed scale is omitted and, instead, a scale (a grating) is arranged on the light-receiving surface of the detector, then it is possible to detect the position information on the moving scale.

Eighth Embodiment

Next is a description of an eighth embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 15 is a side cross-sectional view showing an example of an encoder apparatus 1 H according to an eighth embodiment. In the aforementioned first to seventh embodiments, the descriptions have been for the case where the encoder apparatus is an optical encoder that optically detects the scale, by way of example. Characteristic features of the eighth embodiment will be described for the case where the encoder apparatus 1 H is an electrostatic encoder as disclosed in, for example, Japanese Unexamined Patent Application, First Publication No. 2004-257974, by way of example.

In FIG. 15 , the encoder apparatus 1 H includes a rotor 4 H on which a coupling electrode 2 H is arranged, and a stator 7 H capable of retaining a liquid LC between itself and the rotor 4 H. Within the XY plane, the stator 7 H has a ring shape. The stator 711 includes a transmitting-receiving electrode 5 H. The transmitting-receiving electrode 5 H detects electrostatic force of the rotor 4 H. The transmitting-receiving electrode 5 H is capable of being in contact with the liquid LC, and retaining the liquid LC between itself and the rotor 4 H. The liquid LC is insulating. The liquid LC is retained between the rotor 4 H and the stator 7 H. Also in the present embodiment, attachment of foreign matter to the rotor 4 H or the stator 7 H is suppressed. Thereby, it is possible to suppress occurrence of a detection failure.

In the eighth embodiment, a liquid supply port that supplies the liquid LC may be provided. In addition, a liquid collection port that collects the liquid LC may be provided.

Ninth Embodiment

Next is a description of a ninth embodiment. In the following description, components the same as or similar to those of the aforementioned embodiment are denoted by the same reference symbols, and descriptions thereof are simplified or omitted.

FIG. 16 is a side cross-sectional view showing one example of an encoder apparatus 1 J according to the ninth embodiment. Characteristic features of the eighth embodiment will be described for the case where the encoder apparatus 1 J is a magnetic encoder as disclosed in, for example, Japanese Unexamined Patent Application, First Publication No. 2008-039673, by way of example.

In FIG. 16 , the encoder apparatus 1 J includes a rotor 4 J with a permanent magnet, and a retaining member 7 J capable of retaining a liquid LD between itself and the rotor 4 J. The retaining member 7 J has a ring shape, and is arranged so as to surround the rotor 4 J. The retaining member 7 J has a magnetic field detection element 5 J. The magnetic field detection element 5 J detects a magnetic field of the rotor 4 J. The magnetic field detection element 5 J is capable of being in contact with the liquid LD and retaining the liquid LD between itself and the rotor 4 J. The liquid LD is a magnetic liquid. Note that the liquid LD may be a non-magnetic liquid. The liquid LD is retained between the rotor 4 J and the retaining member 7 J. Also in the present embodiment, attachment of foreign matter to the rotor 4 J or the retaining member 7 J (the magnetic field detection element 5 J) is suppressed. Thereby, it is possible to suppress occurrence of a detection failure.

In the eighth embodiment, a liquid supply port that supplies the liquid LD may be provided. In addition, a liquid collection port that collects the liquid LD may be provided.

The required elements of the aforementioned first to ninth embodiments may be appropriately combined. Furthermore the disclosures in all of the Patent Publications related to encoder apparatuses and the like cited in the above respective embodiments and modified examples are incorporated herein by reference.