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Inventor

Toru Kagaya

Inventor
Tokyo, JP

Overview

15→
Patents
2005–2021
Patent span
Chemistry
Primary field (CPC C)

Patents· 15 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material39%
LOC1317%
H01JElectric discharge tubes or discharge lamps13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
B08BCleaning in general9%
LOC239%
PatentTitleYear
D0925481Inlet liner for substrate processing apparatus2021D0901406Inner tube of reactor for semiconductor fabrication2020D0889596Gas nozzle for substrate processing apparatus2020D0888196Gas nozzle for substrate processing apparatus2020D0853979Reaction tube2019D0839219Boat for substrate processing apparatus20198,598,047'Substrate processing apparatus and producing method of semiconductor device'20138,366,868'Substrate processing apparatus'20138,261,692'Substrate processing apparatus and reaction container'20128,211,802'Substrate processing apparatus'20128,047,158'Substrate processing apparatus and reaction container'20117,900,580'Substrate processing apparatus and reaction container'20117,713,582'Substrate processing method for film formation'20107,622,396'Method of producing a semiconductor device'20096,905,549'Vertical type semiconductor device producing apparatus'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005–2020Patents assigned to HITACHI INT ELECTRIC INC (11)· patent assignee history
2005–2020Based in Tokyo, JP· patent location history
2010–2021Based in Toyama, JP· patent location history
2012–2013Patents assigned to KAGAYA TORU (4)· patent assignee history
2012–2013Patents assigned to SAKAI MASANORI (4)· patent assignee history
2012–2013Patents assigned to OKUDA KAZUYUKI (3)· patent assignee history
2013Based in Toyoma, JP· patent location history
2019–2021Patents assigned to KOKUSAI ELECTRIC CORP (6)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI INT ELECTRIC INC112005–2020
KOKUSAI ELECTRIC CORP62019–2021
KAGAYA TORUself42012–2013
SAKAI MASANORI42012–2013
OKUDA KAZUYUKI32012–2013
Locations
LocationPatentsSpan
Tokyo, JP102005–2020
Toyama, JP42010–2021
Toyoma, JP12013