Inventor
TETSUYA KOSUGI
Inventor
JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices19%
LOC1315%
C23CCoating metallic material11%
F27BFurnaces, kilns, ovens or retorts in general7%
G01KMeasuring temperature7%
H05BElectric heating7%
G05BControl or regulating systems in general4%
G05DSystems for controlling or regulating non-electric variables4%
LOC104%
PatentTitleYear
12,461,507Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program202512,293,930Substrate processing apparatus, method of manufacturing semiconductor device and heater202512,241,159Substrate processing apparatus and ceiling heater202512,085,338Heater, temperature control system, and processing apparatus202412,050,138Substrate processing apparatus, and thermocouple2024D0980177Ceiling heater for substrate processing apparatus2023D0976129Temperature sensor2023D0962183Retainer plate of top heater for wafer processing furnace2022D0962184Retainer plate of top heater for wafer processing furnace2022D0959393Ceiling heater for substrate processing apparatus202211,300,456Substrate processing apparatus, and thermocouple2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to KOKUSAI ELECTRIC CORP (11)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 11 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 11 | 2022–2025 |