Retainer plate of top heater for wafer processing furnace
Granted 30 Aug 2022 · no office action yet
Assignee: Kokusai Electric Co. Ltd.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Tetsuya Kosugi, Shinobu Sugiura, Takatomo Yamaguchi · Examiner: Elizabeth J Oswecki · AU 2926 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front, top and right…
FIG. 1 is a front, top and right side perspective view of a retainer plate of top heater for wafer processing furnace showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof; and
FIG. 6 is a bottom plan view thereof.
FIG. 7 is a rear elevational view thereof; and,
FIG. 8 is a cross-sectional view taken along line 8 - 8 in FIG. 2 .
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D962183-S | S1 | 30 Aug 2022 | 27 Dec 2019 | granted | Retainer plate of top heater for wafer processing furnace |
| JP | JP-1651618-S | S | 27 Jan 2020 | 11 Jul 2019 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D207699-S | S | 11 Oct 2020 | 13 Nov 2019 | published | 基板處理裝置用吸頂式加熱器的保持板zh |
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