Inventor

Martinus Hendrikus Antonius Leenders

Inventor

Rotterdam, NL

Overview

2003–2021

Patent span

Physics

Primary field (CPC G)

Patents· 120 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices70%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%

G03BApparatus or arrangements for taking photographs or for projecting or viewing them2%

H01LSemiconductor devices2%

B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form1%

C09JAdhesives1%

Y10TTechnical subjects covered by former us classification1%

A01GHorticulture1%

A23LFoods, foodstuffs or non-alcoholic beverages, not otherwise provided for1%

A23PShaping or working of foodstuffs, not fully covered by a single other subclass1%

PatentTitleYear

11,016,394Lithographic apparatus and device manufacturing method2021 11,009,803Mask assembly2021 11,003,098Pellicle attachment apparatus2021 10,969,701Pellicle attachment apparatus2021 10,788,763Lithographic apparatus2020 10,768,536Lithographic apparatus and device manufacturing method2020 10,768,535Support apparatus, a lithographic apparatus and a device manufacturing method2020 10,712,656Method for manufacturing a membrane assembly2020 10,705,439Lithographic apparatus and device manufacturing method2020 10,684,554Lithographic apparatus and device manufacturing method2020 10,656,536Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method2020 10,649,341Lithographic apparatus2020 10,649,349Lithographic apparatus, a dryer and a method of removing liquid from a surface2020 10,558,129Mask assembly2020 10,539,886Pellicle attachment apparatus2020 10,514,615Support apparatus, lithographic apparatus and device manufacturing method2019 10,488,759Lithographic apparatus and device manufacturing method2019 10,451,973Lithographic apparatus and device manufacturing method2019 10,444,632Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate2019 10,386,725Lithographic apparatus and device manufacturing method2019 10,353,296Lithographic apparatus and device manufacturing method2019 10,185,231Lithographic apparatus, a dryer and a method of removing liquid from a surface2019 10,175,585Lithographic apparatus and a method of operating the apparatus2019 10,126,664Lithographic apparatus and device manufacturing method2018 10,025,196Lithographic apparatus and device manufacturing method2018 9,989,858Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate2018 9,952,514Lithographic apparatus and device manufacturing method2018 9,904,185'Lithographic apparatus and device manufacturing method'2018 9,632,429'Real-time reticle curvature sensing'2017 9,632,425'Lithographic apparatus, a dryer and a method of removing liquid from a surface'2017 9,618,853'Lithographic apparatus and device manufacturing method'2017 9,606,449'Lithographic apparatus and device manufacturing method'2017 9,599,908'Lithographic apparatus and contamination removal or prevention method'2017 9,581,916'Lithographic apparatus and device manufacturing method'2017 9,513,568'Lithographic apparatus'2016 9,507,278'Lithographic apparatus and device manufacturing method'2016 9,477,153'Lithographic apparatus and device manufacturing method'2016 9,465,302'Lithographic apparatus'2016 9,268,236'Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder'2016 9,229,335'Lithographic apparatus and device manufacturing method'2016 9,188,882'Lithographic apparatus and device manufacturing method'2015 9,158,206'Lithographic apparatus and contamination removal or prevention method'2015 9,146,478'Lithographic apparatus and device manufacturing method'2015 9,140,996'Lithographic apparatus and device manufacturing method'2015 9,081,300'Lithographic apparatus and device manufacturing method'2015 9,036,127'Lithographic apparatus'2015 9,019,466'Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system'2015 9,013,682'Clamping device and object loading method'2015 8,953,141'Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid'2015 8,913,228'Lithographic apparatus and device manufacturing method'2014 8,902,403'Lithographic apparatus and device manufacturing method'2014 8,860,924'Lithographic apparatus and device manufacturing method'2014 8,848,165'Lithographic apparatus and device manufacturing method'2014 8,823,919'Lithographic apparatus, removable member and device manufacturing method'2014 8,823,918'Lithographic apparatus and a method of operating the apparatus'2014 8,786,823'Lithographic apparatus and device manufacturing method'2014 8,711,326'Fluid handling structure, a lithographic apparatus and a device manufacturing method'2014 8,687,168'Lithographic apparatus and device manufacturing method'2014 8,681,311'Lithographic apparatus and device manufacturing method'2014 8,659,741'Lithographic apparatus, removable member and device manufacturing method'2014 8,564,763'Lithographic apparatus and method'2013 8,564,760'Lithographic apparatus, device manufacturing method and a control system'2013 8,514,365'Lithographic apparatus and device manufacturing method'2013 8,481,978'Lithographic apparatus and device manufacturing method'2013 8,446,563'Lithographic apparatus and device manufacturing method'2013 8,432,531'Lithographic apparatus and a method of operating the apparatus'2013 8,427,629'Lithographic apparatus and device manufacturing method'2013 8,421,996'Lithographic apparatus'2013 8,416,395'Lithographic apparatus and method'2013 8,405,817'Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method'2013 8,248,577'Lithographic apparatus and device manufacturing method'2012 8,237,912'Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method'2012 8,232,540'Lithographic apparatus and substrate edge seal'2012 8,144,305'Lithographic apparatus and device manufacturing method'2012 8,138,486'Lithographic apparatus and device manufacturing method'2012 8,120,749'Lithographic apparatus and device manufacturing method'2012 8,115,903'Lithographic apparatus and device manufacturing method'2012 8,023,101'Lithographic apparatus and device manufacturing method'2011 8,003,968'Lithographic apparatus and substrate edge seal'2011 7,978,306'Lithographic apparatus and device manufacturing method'2011 7,969,549'Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method'2011 7,928,407'Lithographic apparatus and device manufacturing method'2011 7,929,112'Lithographic apparatus and device manufacturing method'2011 7,916,269'Lithographic apparatus and contamination removal or prevention method'2011 7,903,232'Lithographic apparatus and device manufacturing method'2011 7,864,292'Lithographic apparatus and device manufacturing method'2011 7,839,483'Lithographic apparatus, device manufacturing method and a control system'2010 7,834,975'Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly'2010 7,804,577'Lithographic apparatus'2010 7,751,027'Lithographic apparatus and device manufacturing method'2010 7,656,502'Lithographic apparatus and device manufacturing method'2010 7,656,501'Lithographic apparatus'2010 7,633,073'Lithographic apparatus and device manufacturing method'2009 7,602,470'Lithographic apparatus and device manufacturing method'2009 7,518,706'Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly'2009 7,492,443'Device manufacturing method, device manufactured thereby and a mask for use in the method'2009 7,480,028'Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program'2009 7,474,379'Lithographic apparatus and device manufacturing method'2009 7,468,779'Lithographic apparatus and device manufacturing method'2008 7,433,016'Lithographic apparatus and device manufacturing method'2008 7,423,733'Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device'2008 7,420,194'Lithographic apparatus and substrate edge seal'2008 7,411,657'Lithographic apparatus and device manufacturing method'2008 7,265,366'Lithographic apparatus and device manufacturing method'2007 7,177,009'Position determination method and lithographic apparatus'2007 7,170,580'Lithographic apparatus, projection system, method of projecting and device manufacturing method'2007 7,119,886'Lithographic apparatus, device manufacturing method, and angular encoder'2006 7,116,399'Lithographic apparatus, device manufacturing method, and device manufactured thereby'2006 7,095,479'Lithographic apparatus, device manufacturing method and device manufactured thereby'2006 7,042,550'Device manufacturing method and computer program'2006 6,977,713'Lithographic apparatus and device manufacturing method'2005 6,956,222'Lithographic apparatus and method of manufacturing a device'2005 6,940,587'Lithographic apparatus and a measurement system'2005 6,930,760'Lithographic apparatus, device manufacturing method, and device manufactured thereby'2005 6,879,374'Device manufacturing method, device manufactured thereby and a mask for use in the method'2005 6,862,075'Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby'2005 6,781,673'Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby'2004 6,741,329'Lithographic apparatus and device manufacturing method'2004 6,678,037'Lithographic apparatus, device manufacturing method, and device manufactured thereby'2004 6,614,505'Lithographic projection apparatus, device manufacturing method, and device manufactured thereby'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2021Patents assigned to ASML NETHERLANDS BV (119)· patent assignee history

2003–2021Based in Rotterdam, NL· patent location history

2009–2021Patents assigned to ASML HOLDING NV (15)· patent assignee history

2009–2021Based in Rhoon, NL· patent location history

2012–2017Patents assigned to LEENDERS MARTINUS HENDRIKUS ANTONIUS (38)· patent assignee history

2012–2017Patents assigned to DONDERS SJOERD NICOLAAS LAMBERTUS (17)· patent assignee history

2012–2016Patents assigned to RIEPEN MICHEL (14)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
ASML NETHERLANDS BV	119	2003–2021
LEENDERS MARTINUS HENDRIKUS ANTONIUSself	38	2012–2017
DONDERS SJOERD NICOLAAS LAMBERTUS	17	2012–2017
ASML HOLDING NV	15	2009–2021
RIEPEN MICHEL	14	2012–2016

Locations

Location	Patents	Span
Rotterdam, NL	62	2003–2021
Rhoon, NL	58	2009–2021