Inventor
Kazuhiro Aiura
Inventor
Koshi, JP
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
B08BCleaning in general9%
G01BMeasuring length, thickness or similar linear dimensions4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
LOC234%
B05BSpraying apparatus2%
B05CApparatus for applying fluent materials to surfaces, in general2%
B05DProcesses for applying fluent materials to surfaces, in general2%
B60BVehicle wheels2%
PatentTitleYear
D0930796Liquid discharge nozzle for semiconductor substrate processing apparatus2021D0929534Liquid discharge nozzle for semiconductor substrate processing apparatus202111,024,518Substrate processing apparatus, substrate processing method and recording medium202110,580,669Substrate processing apparatus and nozzle202010,486,208Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium20199,768,010'Liquid treatment apparatus'20179,768,039'Substrate processing apparatus'20179,691,602'Liquid process apparatus and liquid process method'20179,640,383'Liquid treatment apparatus and liquid treatment method'20179,245,737'Liquid treatment apparatus and liquid treatment method'20169,190,311'Liquid arm cleaning unit for substrate processing apparatus'20159,177,838'Liquid process apparatus and liquid process method'20159,105,671'Liquid processing apparatus and liquid processing method'20159,064,908'Substrate liquid processing apparatus, liquid processing method, and storage medium'20158,865,483'Substrate processing apparatus and substrate processing method'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2021Patents assigned to TOKYO ELECTRON LTD (15)· patent assignee history
2014–2021Based in Kumamoto, JP· patent location history
2015–2017Patents assigned to AIURA KAZUHIRO (6)· patent assignee history
2015–2017Patents assigned to HACHIYA YOSUKE (4)· patent assignee history
2015–2017Patents assigned to ITO NORIHIRO (4)· patent assignee history
2015–2017Patents assigned to SHINDO NAOKI (4)· patent assignee history
2015–2021Based in Koshi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 15 | 2014–2021 |
| AIURA KAZUHIROself | 6 | 2015–2017 |
| HACHIYA YOSUKE | 4 | 2015–2017 |
| ITO NORIHIRO | 4 | 2015–2017 |
| SHINDO NAOKI | 4 | 2015–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 11 | 2015–2021 |
| Kumamoto, JP | 4 | 2014–2021 |