Inventor
Toshimitsu Namba
Inventor
Kyoto, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices45%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1045%
B08BCleaning in general9%
PatentTitleYear
10,312,115Substrate processing apparatus201910,276,407Substrate processing apparatus and substrate processing method201910,211,063Substrate processing apparatus and substrate processing method201910,204,777Substrate processing apparatus and substrate processing method20199,449,807'Substrate processing apparatus and substrate processing method'20169,390,904'Substrate processing apparatus and substrate processing method'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2019Patents assigned to SCREEN HOLDINGS CO LTD (5)· patent assignee history
2016Patents assigned to DAINIPPON SCREEN MFG (1)· patent assignee history
2016–2019Based in Kyoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 5 | 2016–2019 |
| DAINIPPON SCREEN MFG | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 6 | 2016–2019 |