Inventor
Sarath BABU
Inventor
SG
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01JElectric discharge tubes or discharge lamps21%
C23CCoating metallic material11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
LOC137%
H02NElectric machines not otherwise provided for4%
PatentTitleYear
12,476,086Spray-coated electrostatic chuck design202512,148,629Shutter disk202412,100,577High conductance inner shield for process chamber202412,080,522Preclean chamber upper shield with showerhead202411,881,385Methods and apparatus for reducing defects in preclean chambers202411,862,480Shutter disk2024D0973609Upper shield with showerhead for a process chamber2022D0971167Lower shield for a substrate processing chamber202211,476,097Common electrostatic chuck for differing substrates202211,289,357Methods and apparatus for high voltage electrostatic chuck protection202211,251,028Pre-clean chamber with integrated shutter garage2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history
2022–2024Based in SG· patent location history
2025Based in RS· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 11 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| SG | 10 | 2022–2024 |
| RS | 1 | 2025 |