Upper shield with showerhead for a process chamber
Granted 27 Dec 2022 · no office action yet
Current assignee: Applied Materials South East Asia Pte · originally Applied Materials, Inc.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Yuichi Wada, Yueh Sheng Ow, Kelvin Tai Ming Boh, Junqi Wei +3 · Examiner: Patricia A Palasik · AU 2918 · TC 2900
Life of the patent
7 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of a first embodiment of an upper shield with showerhead for a process chamber.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a front elevation view thereof.
FIG. 5 is a back elevation view thereof.
FIG. 6 is a left elevation view thereof.
FIG. 7 is a right elevation view thereof.
FIG. 8 is cross-sectional elevation view thereof, taken along line 8 - 8 of FIG. 2 .
FIG. 9 is a top isometric view of a second embodiment of an upper shield with showerhead for a process chamber.
FIG. 10 is a top plan view thereof.
FIG. 11 is a bottom plan view thereof.
FIG. 12 is a front elevation view thereof.
FIG. 13 is a back elevation view thereof.
FIG. 14 is a left elevation view thereof.
FIG. 15 is a right elevation view thereof; and,
FIG. 16 is cross-sectional elevation view thereof, taken along line 16 - 16 of FIG. 10 .
The dashed lines in FIGS. 1 - 16 represent unclaimed environment forming no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
1 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this patent are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlockTerm & fees
See the term timeline — pendency span, in-force span, the maintenance fees paid and both computed expiry dates.
Log in to unlockWorldwide family
3 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D973609-S | S1 | 27 Dec 2022 | 22 Apr 2020 | granted | Upper shield with showerhead for a process chamber |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D215716-S | S | 1 Dec 2021 | 22 Oct 2020 | published | 用於處理腔室的具噴頭的上護罩zh |
| TW | TW-D215717-S | S | 1 Dec 2021 | 22 Oct 2020 | published | 用於處理腔室的具噴頭的上護罩zh |
Validity challenges
See the validity challenges on record — reexaminations, IPRs and PGRs, with their institution decisions and outcomes.
Log in to unlockCitations
See every patent this one cites and every patent that cites it back — publication, assignee, and how each one was found.
Log in to unlock