Inventor
Rudolf Von Buenau
Inventor
Jena, DE
Overview
Patents· 21 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices46%
G02BOptical elements, systems or apparatus41%
A61FFilters implantable into blood vessels5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
A61BDiagnosis3%
PatentTitleYear
9,772,478'Catadioptric projection objective with parallel, offset optical axes'20178,908,269'Immersion catadioptric projection objective having two intermediate images'20148,804,234'Catadioptric projection objective including an aspherized plate'20148,730,572'Catadioptric projection objective'20148,534,838'Optical coherence reflectometry with depth resolution'20138,355,201'Catadioptric projection objective'20138,339,701'Catadioptric projection objective'20128,307,832'Method and device for increasing an optical system focal depth'20128,289,619'Catadioptric projection objective'20128,208,199'Catadioptric projection objective'20127,950,398'Method and device for increasing an optical system focal depth'20117,869,122'Catadioptric projection objective'20117,791,711'Projection method including pupillary filtering and a projection lens therefor'20107,679,821'Catadioptric projection objective'20107,672,047'Catadioptric projection objective'20107,463,422'Projection exposure apparatus'20087,385,756'Catadioptric projection objective'20087,336,342'Projection method including pupillary filtering and a projection lens therefor'20087,277,157'Projection method including pupillary filtering and a projection lens therefor'20077,031,069'Microlithographic illumination method and a projection lens for carrying out the method'20066,728,043'Microlithographic illumination method and a projection lens for carrying out the method'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2010Based in Essingen, DE· patent location history
2006–2011Patents assigned to ZEISS CARL SMT AG (8)· patent assignee history
2006–2017Based in Jena, DE· patent location history
2012–2017Patents assigned to ZEISS CARL SMT GMBH (8)· patent assignee history
2012–2014Patents assigned to DODOC AURELIAN (6)· patent assignee history
2012–2014Patents assigned to EPPLE ALEXANDER (6)· patent assignee history
2012–2014Patents assigned to MANN HANS-JUERGEN (6)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT AG | 8 | 2006–2011 |
| ZEISS CARL SMT GMBH | 8 | 2012–2017 |
| DODOC AURELIAN | 6 | 2012–2014 |
| EPPLE ALEXANDER | 6 | 2012–2014 |
| MANN HANS-JUERGEN | 6 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Jena, DE | 17 | 2006–2017 |
| Essingen, DE | 4 | 2004–2010 |