A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.

Claims

27 · 3 independent · depth 4

27 granted claims

›1.independentA method of imaging a pattern arranged in an object plane of an optical imaging system into an image plane of the imaging system having a plurality of…+19

›2.↳ 1The method as claimed in claim 1, wherein said locally resolving filtering comprises producing local changes of geometric reflective properties of the…d2

›3.↳ 1The method as claimed in claim 1, wherein, in order to generate a filter function which is rotationally symmetrical in relation to the optical axis, s…d2

›4.↳ 1The method as claimed in claim 1, wherein said subdividing of the mirror comprises producing polygonal mirror segments which substantially fill a tota…d2+1

›6.↳ 1An optical imaging system for imaging the pattern arranged in the object plane of the imaging system into the image plane of the imaging system,nthe i…d2+7

›7.↳ 6The imaging system according to claim 6, wherein the drive devices are designed for moving the mirror segments relative to one another with a movement…d3

›8.↳ 6The imaging system as claimed in claim 6, wherein the mirror has a number of annular or annular-segment-shaped mirror segments, which are arranged con…d3

›9.↳ 6The imaging system as claimed in claim 6, wherein the mirror has a number of polygonal mirror segments which substantially f ill the area of the mirro…d3

›10.↳ 6The imaging system as claimed in claim 6, wherein the mirror segments have a hexagonal shape.d3

›11.↳ 6The imaging system as claimed in claim 6, wherein the mirror has movable mirror segments and, for each movable mirror segment, a drive device that can…d3

›12.↳ 6The imaging system as claimed in claim 6, wherein a drive device for a mirror segment has at least one piezoelectric crystal.d3

›13.↳ 6The imaging system as claimed in claim 6, wherein the imaging system is a catadioptric or catoptric projection objective.d3

›14.↳ 1An arrangement configured for carrying out the method of claim 1, the arrangement comprising:na mirror with a carrier structure incorporated in a fixe…d2+6

›15.↳ 14The arrangement as claimed in claim 14, wherein the drive device comprises a layer of piezoelectric material arranged between the mirror substrate and…d3

›16.↳ 14The arrangement as claimed in claim 14, wherein the mirror is subdivided into a plurality of mirror segments, and wherein at least some of the mirror …d3+1

›18.↳ 14The arrangement as claimed in claim 14, wherein the carrier structure forms the mirror substrate, and wherein the drive device is arranged between the…d3

›19.↳ 14The arrangement as claimed in claim 14, wherein the carrier structure is separate from the mirror substrate, and wherein the drive device is arranged …d3

›20.↳ 14The arrangement as claimed in claim 14, wherein the mirror is a concave mirror.d3

›21.independentA method comprising:nprojecting light through a projection objective; andproviding at least two pupil filter modes of the projected light by adjusting…+5

›27.independentAn optical imaging system for imaging a pattern arranged in an object plane of the imaging system into an image plane of the imaging system, comprisin…

Classifications

4 codes

IPC · International Patent Classification

Section G — Physics

G03B27/42
G03B27/54

USPC · US Patent Classification

355/67355/53

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Pendency

2.9 y

1,068 days filing → grant

Office actions

after a restriction

Responses

2 RCE

Examiner

Henry Hung Nguyen

art unit 2851 · TC 2800

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Citations: 30 back · 6 forward

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Priority chain

1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20050146701 A1	7 Jul 2005

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