Inventor
Timothy S. Dyer
Inventor
Tempe, AZ, US
Overview
Patents· 35 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Sprimary
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
C23CCoating metallic material11%
H01JElectric discharge tubes or discharge lamps11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
B24BMachines, devices, or processes for grinding or polishing9%
Y10TTechnical subjects covered by former us classification7%
B82YSpecific uses or applications of nanostructures4%
H05GX-ray technique2%
H05HPlasma technique2%
PatentTitleYear
10,648,148Sheet for use in ground works20208,893,702'Ductile mode machining methods for hard and brittle components of plasma processing apparatuses'20148,742,604'Systems and methods for combined flow control and electricity generation'20147,851,011'Anodes for fluorine gas discharge lasers'20107,522,650'Gas discharge laser chamber improvements'20097,476,887'EUV light source optical elements'20097,368,741'Extreme ultraviolet light source'20087,366,219'Line narrowing module'20087,339,973'Electrodes for fluorine gas discharge lasers'20087,301,980'Halogen gas discharge laser electrodes'20077,229,343'Orbiting indexable belt polishing station for chemical mechanical polishing'20077,230,965'Anodes for fluorine gas discharge lasers'20077,193,228'EUV light source optical elements'20077,132,123'High rep-rate laser with improved electrodes'20067,095,774'Cathodes for fluorine gas discharge lasers'20066,972,421'Extreme ultraviolet light source'20056,937,635'High rep-rate laser with improved electrodes'20056,793,565'Orbiting indexable belt polishing station for chemical mechanical polishing'20046,721,162'Electrostatic chuck having composite dielectric layer and method of manufacture'20046,690,706'High rep-rate laser with improved electrodes'20046,661,826'Laser chamber insulator with sealed electrode feedthrough'20036,652,366'Dynamic slurry distribution control for CMP'20036,540,592'Carrier head with reduced moment wear ring'20036,465,051'Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling'20026,447,368'Carriers with concentric balloons supporting a diaphragm'20026,414,834'Dielectric covered electrostatic chuck'20026,409,580'Rigid polishing pad conditioner for chemical mechanical polishing tool'20026,288,357'Ion milling planarization of semiconductor workpieces'20016,209,483'Apparatus and method for removing silicon dioxide residues from CVD reactors'20016,203,417'Chemical mechanical polishing tool components with improved corrosion resistance'20016,108,189'Electrostatic chuck having improved gas conduits'20005,904,776'Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck'19995,800,623'Semiconductor wafer support platform'19985,744,400'Apparatus and method for dry milling of non-planar features on a semiconductor surface'19985,720,818'Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2004Patents assigned to APPLIED MATERIALS INC (6)· patent assignee history
1998–2007Based in Tempe, AZ, US· patent location history
2001–2007Patents assigned to SPEEDFAM IPEC CORP (8)· patent assignee history
2001Patents assigned to ACCORD S E G (1)· patent assignee history
2003–2010Patents assigned to CYMER INC (14)· patent assignee history
2003–2009Based in Oceanside, CA, US· patent location history
2007–2010Based in Auburn, CA, US· patent location history
2014–2020Patents assigned to DYER TIMOTHY (2)· patent assignee history
2014Based in San Leandro, CA, US· patent location history
2020Based in Northamptonshire, GB· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CYMER INC | 14 | 2003–2010 |
| SPEEDFAM IPEC CORP | 8 | 2001–2007 |
| APPLIED MATERIALS INC | 6 | 1998–2004 |
| DYER TIMOTHYself | 2 | 2014–2020 |
| ACCORD S E G | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tempe, AZ, US | 16 | 1998–2007 |
| Oceanside, California, US | 9 | 2003–2009 |
| Auburn, California, US | 6 | 2007–2010 |
| San Leandro, California, US | 2 | 2014 |
| Northamptonshire, GB | 1 | 2020 |