LexDanaLexDanabeta
Inventor

Kazunori Hasimoto

Inventor
Tachikawa, JP

Overview

3→
Patents
1994
Patent span

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

PatentTitleYear
D0352911'Processing machine for electron beam lithography system'1994D0352910'Processing machine for electron beam lithography system'1994D0349888'Controller for semi-conductor processing machine'1994

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1994Patents assigned to HITACHI LTD (3)· patent assignee history
1994Based in Tachikawa, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD31994
Locations
LocationPatentsSpan
Tachikawa, JP31994