Inventor
Marc Antonius Maria Haast
Inventor
Eindhoven, NL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices47%
G02BOptical elements, systems or apparatus16%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution5%
PatentTitleYear
8,711,325'Method and system for determining a suppression factor of a suppression system and a lithographic apparatus'20148,629,418'Lithographic apparatus and sensor therefor'20148,426,831'Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector'20138,324,598'Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector'20128,138,485'Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector'20127,655,367'Lithographic apparatus and device manufacturing method'20107,586,108'Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector'20097,453,078'Sensor for use in a lithographic apparatus'20087,282,701'Sensor for use in a lithographic apparatus'20077,145,630'Lithographic apparatus and device manufacturing method'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2014Patents assigned to ASML NETHERLANDS BV (9)· patent assignee history
2006–2014Based in Eindhoven, NL· patent location history
2012–2014Patents assigned to HAAST MARC ANTONIUS MARIA (4)· patent assignee history
2012–2014Patents assigned to MOEST BEARRACH (3)· patent assignee history
2012–2013Patents assigned to BAAS GERARDUS WILHELMUS PETRUS (2)· patent assignee history
2012–2013Patents assigned to GOMMEREN GREGORY MICHA (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 9 | 2006–2014 |
| HAAST MARC ANTONIUS MARIAself | 4 | 2012–2014 |
| MOEST BEARRACH | 3 | 2012–2014 |
| BAAS GERARDUS WILHELMUS PETRUS | 2 | 2012–2013 |
| GOMMEREN GREGORY MICHA | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 10 | 2006–2014 |