LexDanaLexDanabeta
Inventor

Keisuke Kondoh

Inventor
Nirasaki, JP

Overview

28→
Patents
2001–2019
Patent span
Electricity
Primary field (CPC H)

Patents· 28 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1046%
H01LSemiconductor devices13%
B25JManipulators10%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
Y10TTechnical subjects covered by former us classification6%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors4%
F16KValves4%
C23CCoating metallic material2%
G01BMeasuring length, thickness or similar linear dimensions2%
G05BControl or regulating systems in general2%
PatentTitleYear
10,403,529Carrier transport device and carrier transport method201910,347,510Substrate transfer chamber, substrate processing system, and method for replacing gas in substrate transfer chamber201910,229,847Substrate transfer chamber and container connecting mechanism with lid opening mechanisms201910,134,619Connecting mechanism and connecting method of substrate container201810,128,134Substrate transfer method and processing system20189,732,881'Gate valve and substrate processing system'20179,455,166'Substrate transporting apparatus, substrate delivery position confirming method, and substrate processing system'20169,448,063'Method and apparatus for detecting position of substrate transfer device, and storage medium'20168,740,535'Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage medium'20148,395,136'Positional deviation detection apparatus and process system employing the same'20138,382,088'Substrate processing apparatus'20138,382,938'Gate valve cleaning method and substrate processing system'20138,326,468'Substrate transfer apparatus, substrate transfer module, substrate transfer method and computer readable storage medium'20128,280,545'Vacuum processing apparatus and method, and storage medium for executing the method'20128,113,757'Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber'20128,048,235'Gate valve cleaning method and substrate processing system'20117,942,622'Transfer/alignment method in vacuum processing apparatus, vacuum processing apparatus and computer storage medium'20117,361,920'Substrate processing apparatus and transfer positioning method thereof'2008D0556157'Load-lock chamber'20077,286,890'Transfer apparatus for target object'20077,198,251'Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same'20077,129,147'Delivery position aligning method for use in a transfer system and a processing system employing the method'2006D0527751'Transfer-chamber'20067,018,162'Articulated carrying device'20066,950,721'Positioning substrate for semiconductor process'20056,699,003'Carrying device'20046,450,757'Conveyor system'20026,328,864'Vacuum processing apparatus'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2019Patents assigned to TOKYO ELECTRON LTD (28)· patent assignee history
2001–2004Based in Kofu, JP· patent location history
2005–2019Based in Nirasaki, JP· patent location history
2006–2019Based in Yamanashi, JP· patent location history
2012–2014Patents assigned to KONDOH KEISUKE (7)· patent assignee history
2012–2013Patents assigned to MORIYA TSUYOSHI (2)· patent assignee history
2012–2013Patents assigned to NAKAYAMA HIROYUKI (2)· patent assignee history
2012–2013Patents assigned to OKA HIROKI (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD282001–2019
KONDOH KEISUKEself72012–2014
MORIYA TSUYOSHI22012–2013
NAKAYAMA HIROYUKI22012–2013
OKA HIROKI22012–2013
Locations
LocationPatentsSpan
Nirasaki, JP142005–2019
Yamanashi, JP112006–2019
Kofu, JP32001–2004