Inventor
Norbert R. Bowering
Inventor
San Diego, CA, US
Overview
Patents· 34 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices22%
H05GX-ray technique20%
B82YSpecific uses or applications of nanostructures16%
G21KHandling of particles or ionising radiation not otherwise provided for15%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
G02BOptical elements, systems or apparatus5%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light5%
H01JElectric discharge tubes or discharge lamps4%
H05HPlasma technique2%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
10,185,234Harsh environment optical element protection20199,735,535'Drive laser for EUV light source'20179,632,418'Target material supply apparatus for an extreme ultraviolet light source'20179,392,678'Target material supply apparatus for an extreme ultraviolet light source'20168,907,310'EUV optics'20148,686,370'EUV light source components and methods for producing, using and refurbishing same'20148,598,549'EUV optics'20138,514,486'Drive laser for EUV light source'20138,314,398'EUV light source components and methods for producing, using and refurbishing same'20128,198,612'Systems and methods for heating an EUV collector mirror'20128,035,092'Laser produced plasma EUV light source'20117,960,701'EUV light source components and methods for producing, using and refurbishing same'20117,872,245'Systems and methods for target material delivery in a laser produced plasma EUV light source'20117,843,632'EUV optics'20107,732,793'Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source'20107,671,349'Laser produced plasma EUV light source'20107,598,509'Laser produced plasma EUV light source'20097,589,337'LPP EUV plasma source material target delivery system'20097,525,111'High repetition rate laser produced plasma EUV light source'20097,476,887'EUV light source optical elements'20097,465,946'Alternative fuels for EUV light source'20087,453,077'EUV light source'20087,394,083'Systems and methods for EUV light source metrology'20087,368,741'Extreme ultraviolet light source'20087,365,351'Systems for protecting internal components of a EUV light source from plasma-generated debris'20087,323,703'EUV light source'20087,309,871'Collector for EUV light source'20077,288,778'Collector for EUV light source'20077,217,940'Collector for EUV light source'20077,193,228'EUV light source optical elements'20077,164,144'EUV light source'20077,109,503'Systems for protecting internal components of an EUV light source from plasma-generated debris'20066,972,421'Extreme ultraviolet light source'20056,815,700'Plasma focus light source with improved pulse power system'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2019Patents assigned to CYMER INC (27)· patent assignee history
2004–2012Based in San Diego, CA, US· patent location history
2011–2019Based in Bielefeld, DE· patent location history
2012–2013Patents assigned to BOWERING NORBERT R (4)· patent assignee history
2012–2013Patents assigned to FOMENKOV IGOR V (3)· patent assignee history
2013–2017Patents assigned to Cymer LLC (5)· patent assignee history
2014–2019Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CYMER INC | 27 | 2004–2019 |
| ASML NETHERLANDS BV | 5 | 2014–2019 |
| Cymer LLC | 5 | 2013–2017 |
| BOWERING NORBERT Rself | 4 | 2012–2013 |
| FOMENKOV IGOR V | 3 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Diego, California, US | 23 | 2004–2012 |
| Bielefeld, DE | 11 | 2011–2019 |