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Inventor

Joseph P. Kirk

Inventor
Chelsea, NY, US

Overview

10→
Patents
1981–2005
Patent span
Physics
Primary field (CPC G)

Patents· 10 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G01MTesting static or dynamic balance of machines or structures25%
G02BOptical elements, systems or apparatus8%
PatentTitleYear
6,842,237'Phase shifted test pattern for monitoring focus and aberrations in optical projection systems'20056,606,151'Grating patterns and method for determination of azimuthal and radial aberration'20036,091,486'Blazed grating measurements of lithographic lens aberrations'20006,048,651'Fresnel zone mask for pupilgram'20005,898,498'Point interferometer to measure phase shift in reticles'19995,808,731'System and method for visually determining the performance of a photolithography system'19985,663,785'Diffraction pupil filler modified illuminator for annular pupil fills'1997T0102104'Scanning optical system adapted for linewidth measurement in semiconductor devices'19824,293,224'Optical system and technique for unambiguous film thickness monitoring'19814,260,259'Metal etch rate analyzer'1981

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1981–2005Patents assigned to IBM (9)· patent assignee history
1981–2005Based in Chelsea, NY, US· patent location history
1982Patents assigned to KIRK JOSEPH P (1)· patent assignee history
1982Patents assigned to PREDATSCH JOSEF (1)· patent assignee history
1982Patents assigned to SU LO SOUN (1)· patent assignee history
1997Based in Dutchess County, NY, US· patent location history
2003Patents assigned to INFINEON TECHNOLOGIES AG (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
IBM91981–2005
INFINEON TECHNOLOGIES AG12003
KIRK JOSEPH Pself11982
PREDATSCH JOSEF11982
SU LO SOUN11982
Locations
LocationPatentsSpan
Chelsea, New York, US91981–2005
Dutchess County, New York, US11997