Inner shield for a substrate processing chamber
Granted 23 Mar 2021 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Sarath Babu, Ananthkrishna Jupudi, Kang Zhang, Junqi Wei +3 · Examiner: Michael C Stout · AU 2924 · TC 2900
Life of the patent
8 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of the first embodiment for an inner shield for a substrate processing chamber, according to the new design.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a front elevation view thereof.
FIG. 5 is a back elevation view thereof.
FIG. 6 is a right side elevation view thereof.
FIG. 7 is a left side elevation view thereof.
FIG. 8 is a cross-sectional view taken along line 8 - 8 in FIG. 2 .
FIG. 9 is a top isometric view of the second embodiment for an inner shield for a substrate processing chamber, according to the new design.
FIG. 10 is a top plan view thereof.
FIG. 11 is a bottom plan view thereof.
FIG. 12 is a front elevation view thereof.
FIG. 13 is a back elevation view thereof.
FIG. 14 is a right side elevation view thereof.
FIG. 15 is a left side elevation view thereof; and,
FIG. 16 is a cross-sectional view taken along line 16 - 16 in FIG. 10 .
The broken lines in FIGS. 1-16 show portions of an inner shield for a substrate processing chamber which form no part of the claimed design.
Claims
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5 members · 3 offices›IP5 & PCT — 3 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D913979-S | S1 | 23 Mar 2021 | 28 Aug 2019 | granted | Inner shield for a substrate processing chamber |
| JP | JP-1683051-S | S | 12 Apr 2021 | 27 Feb 2020 | granted | no title held |
| JP | JP-1683107-S | S | 12 Apr 2021 | 27 Feb 2020 | granted | no title held |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D214316-S | S | 1 Oct 2021 | 27 Feb 2020 | published | 基板處理腔室的內部護罩zh |
| TW | TW-D218527-S | S | 1 May 2022 | 27 Feb 2020 | published | 基板處理腔室的內部護罩zh |
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