Brush for cleaning semiconductor polishing disk
Granted 28 Jun 2016 · 4 office actions
Assignee: Ebara Corporation
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Hiroyuki Shinozaki · Examiner: John Windmuller · AU 2919 · TC 2900
Life of the patent
9 dated eventsDescription
1 parts›FIG. 1 is a perspective view of a…
FIG. 1 is a perspective view of a brush for cleaning semiconductor polishing disk showing my new design;
FIG. 2 is a top view thereof;
FIG. 3 is a front elevation view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof; and,
FIG. 6 is a reference view showing a usable state thereof.
The broken line showing is included for the purpose of illustrating environment and forms no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D760455-S | S1 | 28 Jun 2016 | 7 Feb 2013 | granted | Brush for cleaning semiconductor polishing disk |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D158719-S | S | 1 Feb 2014 | 6 Feb 2013 | published | 半導體研磨碟洗淨用刷子zh |
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