Boat for substrate processing apparatus

FIG. 1 is a perspective view of a boat for substrate processing apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view thereof taken along line 8 - 8 in FIG. 3 ;

FIG. 9 is a cross-sectional view thereof taken along line 9 - 9 in FIG. 8 ;

FIG. 10 is a cross-sectional view thereof taken along line 10 - 10 in FIG. 8 ;

FIG. 11 is an enlarged perspective view thereof taken along line 11 - 11 in FIG. 1 ;

FIG. 12 is an enlarged front elevation view thereof taken along line 12 - 12 in FIG. 2 ;

FIG. 13 is an enlarged rear elevation view thereof taken along line 13 - 13 in FIG. 3 ;

FIG. 14 is an enlarged top plan view thereof taken along line 14 - 14 in FIG. 1 ;

FIG. 15 is an enlarged bottom plan view thereof taken along line 15 - 15 in FIG. 1 ;

FIG. 16 is an enlarged right side view thereof taken along line 16 - 16 in FIG. 4 ; and,

FIG. 17 is an enlarged left side view thereof taken along line 17 - 17 in FIG. 5 .

The broken lines in the drawing views are included for the purpose of illustrating the unclaimed portions of the boat for substrate processing apparatus and form no part of the claimed design.