Inventor
Yuji Urano
Inventor
Toyama, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01LSemiconductor devices13%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
B08BCleaning in general7%
LOC137%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry3%
C01GCompounds containing metals not covered by subclasses c01d or c01f3%
C01PIndexing scheme relating to structural and physical aspects of solid inorganic compounds3%
C09KMaterials for miscellaneous applications, not provided for elsewhere3%
PatentTitleYear
9,895,727'Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium'20189,881,789'Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium'20189,856,560'Method for manufacturing semiconductor device and substrate processing apparatus'20189,620,357'Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium'20179,587,308'Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium'2017D0740769'Boat for substrate processing apparatus'2015D0739831'Boat for substrate processing apparatus'20158,741,783'Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium'20148,304,328'Manufacturing method of semiconductor device and substrate processing apparatus'20126,777,609'Thermoelectric conversion material and thermoelectric conversion device'20046,707,249'Electroluminescent device and oxide phosphor for use therein'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004Patents assigned to HOKUSHIN CORP (2)· patent assignee history
2004Based in Yokohama, JP· patent location history
2012–2018Patents assigned to HITACHI INT ELECTRIC INC (9)· patent assignee history
2012–2018Patents assigned to URANO YUJI (3)· patent assignee history
2012Patents assigned to KOSHI YASUNOBU (1)· patent assignee history
2012–2018Based in Toyama, JP· patent location history
2014–2018Patents assigned to KAMEDA KENJI (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 9 | 2012–2018 |
| URANO YUJIself | 3 | 2012–2018 |
| HOKUSHIN CORP | 2 | 2004 |
| KAMEDA KENJI | 2 | 2014–2018 |
| KOSHI YASUNOBU | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Toyama, JP | 9 | 2012–2018 |
| Yokohama, JP | 2 | 2004 |