Exhaust ring for manufacturing semiconductors

FIG. 1 is a front/top/right-side perspective view of an exhaust ring for manufacturing semiconductors showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right-side elevational view thereof, the left-side elevational view being a mirror image and, therefore, not shown;

FIG. 6 is a rear elevational view thereof;

FIG. 7 is a reference front elevational view;

FIG. 8 is a cross-sectional view taken along line 8—8 in FIG. 7;

FIG. 9 is an enlarged, partial, cross-sectional view taken along line 9—9 in FIG. 8; and,

FIG. 10 is an enlarged, partial, cross-sectional view taken along line 10—10 in FIG. 8.

The exhaust ring for manufacturing semiconductors is used in a vacuum vessel for manufacturing semiconductors.