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Inventor

Kazuyuki Tezuka

Inventor
Nirasaki, JP

Overview

6→
Patents
2004–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 6 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
C23CCoating metallic material17%
H01JElectric discharge tubes or discharge lamps17%
G01MTesting static or dynamic balance of machines or structures8%
G05DSystems for controlling or regulating non-electric variables8%
H01LSemiconductor devices8%
LOC138%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
10,665,431Processing method20209,169,558'Fluid control apparatus'20158,394,230'Plasma processing apparatus'20137,472,581'Vacuum apparatus'20097,299,104'Substrate processing apparatus and substrate transferring method'2007D0494552'Exhaust ring for manufacturing semiconductors'2004

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2004–2020Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2004–2015Based in Nirasaki, JP· patent location history
2013–2015Patents assigned to TEZUKA KAZUYUKI (2)· patent assignee history
2015Patents assigned to DOHI RYOUSUKE (1)· patent assignee history
2015Patents assigned to FUJIKIN KK (1)· patent assignee history
2015Patents assigned to HIROSE JUN (1)· patent assignee history
2020Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD62004–2020
TEZUKA KAZUYUKIself22013–2015
DOHI RYOUSUKE12015
FUJIKIN KK12015
HIROSE JUN12015
Locations
LocationPatentsSpan
Nirasaki, JP52004–2015
Miyagi, JP12020