USPatentGranted
S

Instrument for transferring boats for thermal treatment of semiconductor wafers

Granted 16 Jun 1992 · no office action yet

Application
301994
filed 25 Jan 1989
Publication
Not published
not published
Patent· this page
US D327078
granted 16 Jun 1992

Life of the patent

2 dated events
⤢ drag to zoomJan 1989Jul 1989Jan 1990Jul 1990Jan 1991Jul 1991Jan 1992Jul 1992Prosecution
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Description

1 parts
›FIG. 1 is a front elevational view of…

FIG. 1 is a front elevational view of an instrument for transferring boats for thermal treatment of semiconductor wafers showing our new design;

FIG. 2 is an elevational view, the remainder of the cylindrical member being the same throughout in appearance;

FIG. 3 is a top plan view;

FIG. 4 is a bottom plan view;

FIG. 5 is an elevational view thereof;

FIG. 6 is a top perspective view; and,

FIG. 7 is a bottom perspective view thereof.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D15/144

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File wrapper

Pendency
3.4 y
1,238 days filing → grant
Office actions
0
on the grant's record
Examiner
Donald P. Walsh
art unit 293 · TC 2900
Citations: 5 back · 0 forward

Chain of title

⤢ drag to zoom199219941996199820002002200420062008Owner 1
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