Instrument for transferring boats for thermal treatment of semiconductor wafers
Granted 16 Jun 1992 · no office action yet
Assignee: Tel Sagami Limited
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Attorney: Attorney · Log in to unlock
Inventors: Ken Nakao, Wataru Ohkase, Seishiro Sato · Examiner: Donald P. Walsh · AU 293 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front elevational view of…
FIG. 1 is a front elevational view of an instrument for transferring boats for thermal treatment of semiconductor wafers showing our new design;
FIG. 2 is an elevational view, the remainder of the cylindrical member being the same throughout in appearance;
FIG. 3 is a top plan view;
FIG. 4 is a bottom plan view;
FIG. 5 is an elevational view thereof;
FIG. 6 is a top perspective view; and,
FIG. 7 is a bottom perspective view thereof.
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