Inventor
Wataru Ohkase
Inventor
Sagamihara, JP
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
C30BSingle-crystal growth21%
C23CCoating metallic material15%
F27BFurnaces, kilns, ovens or retorts in general6%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace6%
G05DSystems for controlling or regulating non-electric variables6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
H05BElectric heating3%
PatentTitleYear
6,111,225'Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures'20005,763,856'Heat treatment apparatus and method'19985,616,264'Method and apparatus for controlling temperature in rapid heat treatment system'19975,536,918'Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers'19965,520,742'Thermal processing apparatus with heat shielding member'19965,443,648'Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate'19955,393,349'Semiconductor wafer processing apparatus'1995D0327078'Instrument for transferring boats for thermal treatment of semiconductor wafers'1992D0326273'Heat insulating cylinder for thermal treatment of semiconductor wafers'1992D0326272'Heat insulating cylinder for thermal treatment of semiconductor wafers'19925,007,788'Pitch changing device for changing pitches of plate-like objects and method of changing pitches'19914,955,775'Semiconductor wafer treating apparatus'19904,952,115'Wafer support device'19904,950,870'Heat-treating apparatus'19904,943,235'Heat-treating apparatus'19904,938,691'Heat-treating apparatus'1990Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1990–1996Patents assigned to TEL SAGAMI LTD (11)· patent assignee history
1990–2000Based in Sagamihara, JP· patent location history
1995–2000Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
1995Patents assigned to TOKYO ELECTRON TOBOKU KABUSHIK (1)· patent assignee history
1996Patents assigned to TOKYO ELECTRON TOHOKU KABUSHIK (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEL SAGAMI LTD | 11 | 1990–1996 |
| TOKYO ELECTRON LTD | 5 | 1995–2000 |
| TOKYO ELECTRON TOBOKU KABUSHIK | 1 | 1995 |
| TOKYO ELECTRON TOHOKU KABUSHIK | 1 | 1996 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sagamihara, JP | 16 | 1990–2000 |