Upper shield with showerhead for a process chamber

FIG. 1 is a top isometric view of a first embodiment of an upper shield with showerhead for a process chamber.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a left elevation view thereof.

FIG. 7 is a right elevation view thereof.

FIG. 8 is cross-sectional elevation view thereof, taken along line 8 - 8 of FIG. 2 .

FIG. 9 is a top isometric view of a second embodiment of an upper shield with showerhead for a process chamber.

FIG. 10 is a top plan view thereof.

FIG. 11 is a bottom plan view thereof.

FIG. 12 is a front elevation view thereof.

FIG. 13 is a back elevation view thereof.

FIG. 14 is a left elevation view thereof.

FIG. 15 is a right elevation view thereof; and,

FIG. 16 is cross-sectional elevation view thereof, taken along line 16 - 16 of FIG. 10 .

The dashed lines in FIGS. 1 - 16 represent unclaimed environment forming no part of the claimed design.