Susceptor shaft
Granted 5 Apr 2022 · no office action yet
Assignee: ASM International
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Aniket Patil, Sam Kim · Examiner: Elizabeth J Oswecki · AU 2926 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front perspective view of…
FIG. 1 is a front perspective view of a susceptor shaft showing our new design;
FIG. 2 is a back perspective view thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a back view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a top view thereof; and,
FIG. 8 is a bottom view thereof.
Claims
1 · 1 independent · depth 1Classifications
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3 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D947913-S | S1 | 5 Apr 2022 | 17 May 2019 | granted | Susceptor shaft |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D209150-S | S | 1 Jan 2021 | 11 Nov 2019 | published | 基座軸zh |
| TW | TW-D209151-S | S | 1 Jan 2021 | 11 Nov 2019 | published | 基座軸zh |
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