Cover of seal cap for reaction chamber for semiconductor manufacturing
Granted 7 Jan 2020 · no office action yet
Assignee: Kokusai Electric Co. Ltd.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Shuhei Saido, Takafumi Sasaki, Yusaku Okajima, Hidenari Yoshida · Examiner: Derrick E Holland · AU 2912 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›FIG. 1 is a front, bottom and right…
FIG. 1 is a front, bottom and right side perspective view of a cover of seal cap for reaction chamber for semiconductor manufacturing showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a top plan view thereof; and
FIG. 7 is a bottom plan view thereof.
FIG. 8 is a cross-sectional view take along line 8 - 8 in FIG. 6 ; and,
FIG. 9 is a cross-sectional view take along line 9 - 9 in FIG. 7 .
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D872037-S | S1 | 7 Jan 2020 | 30 Jan 2018 | granted | Cover of seal cap for reaction chamber for semiconductor manufacturing |
| JP | JP-1598442-S | S | 26 Feb 2018 | 9 Aug 2017 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D193014-S | S | 21 Sep 2018 | 20 Dec 2017 | published | Sealing cover inner coverzh |
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