Sheet heater for electrostatic chuck

FIG. 1 is a front view of a first embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 4 is a right view thereof, the left view thereof being a mirror image;

FIG. 5 is an enlarged view taken along line 5 - 5 in FIG. 1 ;

FIG. 6 is an enlarged view taken along line 6 - 6 in FIG. 5 ;

FIG. 7 is an enlarged view taken along line 7 - 7 in FIG. 6 ;

FIG. 8 is an enlarged view taken along line 8 - 8 in FIG. 7 ;

FIG. 9 is a front view of a second embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 10 is a rear view thereof;

FIG. 11 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 12 is a right view thereof, the left view thereof being a mirror image;

FIG. 13 is an enlarged view taken along line 13 - 13 in FIG. 9 ;

FIG. 14 is an enlarged view taken along line 14 - 14 in FIG. 13 ;

FIG. 15 is an enlarged view taken along line 15 - 15 in FIG. 14 ;

FIG. 16 is an enlarged view taken along line 16 - 16 in FIG. 15 ;

FIG. 17 is a front view of a third embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 18 is a rear view thereof;

FIG. 19 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 20 is a right view thereof, the left view thereof being a mirror image;

FIG. 21 is an enlarged view taken along line 21 - 21 in FIG. 17 ;

FIG. 22 is an enlarged view taken along line 22 - 22 in FIG. 21 ;

FIG. 23 is an enlarged view taken along line 23 - 23 in FIG. 22 ; and,

FIG. 24 is an enlarged view taken along line 24 - 24 in FIG. 23 .

The broken lines in the drawings depict unclaimed subject matter only and form no part of the claimed design.