Substrate retaining ring
Granted 10 Oct 2017 · no office action yet
Assignee: Ebara Corporation
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Keisuke Namiki, Osamu Nabeya, Hozumi Yasuda, Satoru Yamaki +2 · Examiner: Thomas Johannes · AU 2921 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a perspective view, observed from…
FIG. 1 is a perspective view, observed from top of a substrate retaining ring showing our new design;
FIG. 2 is a perspective view, observed from bottom thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a front view, rear view, right side view and left side view thereof;
FIG. 6 is an enlarged cross-section view, taken along the line 6 - 6 of part 6 of FIG. 3 thereof;
FIG. 7 is an enlarged cross-section view, taken along the line 7 - 7 of part 7 of FIG. 3 thereof; and,
FIG. 8 is an enlarged cross-section view, taken along the line 8 - 8 of part 8 of FIG. 3 thereof.
Claims
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D799437-S | S1 | 10 Oct 2017 | 24 Feb 2016 | granted | Substrate retaining ring |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D179095-S | S | 21 Oct 2016 | 17 Feb 2016 | published | 基板保持環zh |
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