Retainer ring for substrate
Granted 15 Aug 2017 · no office action yet
Assignee: Ebara Corporation
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Shingo Togashi, Osamu Nabeya, Hozumi Yasuda, Keisuke Namiki +2 · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a retainer ring for substrate showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a front view thereof;
FIG. 6 is a rear view thereof;
FIG. 7 is a right side view thereof;
FIG. 8 is a left side view thereof;
FIG. 9 is an enlarged cross-section view thereof, taken along the line 9 - 9 of part 9 of FIG. 3 ;
FIG. 10 is an enlarged cross-section view thereof, taken along the line 10 - 10 of part 10 of FIG. 3 ;
FIG. 11 is an enlarged cross-section view thereof, taken along the line 11 - 11 of part 11 of FIG. 3 ;
FIG. 12 is an enlarged perspective view thereof, observed from an inside of the retainer ring and taken along the line 12 , 13 - 12 , 13 of FIG. 4 ; and,
FIG. 13 is an enlarged perspective view thereof, observed from an outside of the retainer ring and taken along the line 12 , 13 - 12 , 13 of FIG. 4 .
The broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D794585-S | S1 | 15 Aug 2017 | 5 Apr 2016 | granted | Retainer ring for substrate |
| JP | JP-1556433-S | S | 15 Aug 2016 | 6 Oct 2015 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D179672-S | S | 21 Nov 2016 | 31 Mar 2016 | published | 基板保持環之部分zh |
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