Substrate retaining ring

FIG. 1 is a top perspective view of a substrate retaining ring, showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side view thereof, with the ring being radially symmetrical about a vertical axis;

FIG. 6 is a cross sectional view taken along line 6 - 6 in FIG. 3 ;

FIG. 7 is a cross sectional view taken along line 7 - 7 in FIG. 3 ; and,

FIG. 8 is a cross sectional view taken along line 8 - 8 in FIG. 3 .