Gas nozzle substrate processing apparatus

FIG. 1 is a perspective view of a gas nozzle substrate processing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a right side elevational view thereof;

FIG. 8 is an enlarged right side elevational view thereof; and

FIG. 9 is an enlarged portion view taken along line 9 - 9 in FIG. 2 ;

FIG. 10 is a cross sectional view take along line 10 - 10 in FIG. 9 ; and,

FIG. 11 is a cross sectional view take along line 11 - 11 in FIG. 9 .