Return nozzle
Granted 6 Dec 2016 · no office action yet
Current assignee: Kokusai Electric Co. Ltd. · originally Hitachi, Ltd.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Naoki Matsumoto, Naonori Akae, Shinya Morita, Masato Terasaki +1 · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front, bottom and right…
FIG. 1 is a front, bottom and right side perspective view of a return nozzle showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a right side elevational view thereof;
FIG. 8 is an enlarged front view taken along line 8 - 8 in FIG. 2 thereof;
FIG. 9 is an enlarged bottom view taken along line 9 - 9 in FIG. 5 thereof; and,
FIG. 10 is an enlarged cross sectional view taken along line 10 - 10 in FIG. 9 .
The dashed-dot-dashed lines represent the boundary lines of the claimed design. The broken lines shown in the drawings represent portions of the return nozzle that form no part of the claimed design.
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D773609-S | S1 | 6 Dec 2016 | 27 Feb 2015 | granted | Return nozzle |
| JP | JP-1521275-S | S | 13 Apr 2015 | 10 Sep 2014 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D171078-S | S | 11 Oct 2015 | 3 Mar 2015 | published | 基板處理裝置用氣體供給噴嘴之部分zh |
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