Inner tube for process tube for manufacturing semiconductor wafers
Granted 17 Mar 2015 · 2 office actions
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Hirofumi Kaneko, Atsushi Endo · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
7 dated eventsDescription
1 parts›FIG. 1 is a perspective view of an…
FIG. 1 is a perspective view of an inner tube for process tube for manufacturing semiconductor wafers showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is an enlarged cross-sectional view taken along line 8 - 8 of FIG. 2 ; and,
FIG. 9 is another front view thereof, shown in a used condition.
The broken lines shown in the drawings represent portions of the inner tube for process tube for manufacturing semiconductor wafers that form no part of the claimed design.
Claims
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