Absorption board for an electric chuck used in semiconductor manufacture
Granted 16 Oct 2007 · no office action yet
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Kaoru Oohashi, Takehiro Ueda, Shunsuke Mizukami · Examiner: Selina Sikder · AU 2912 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a perspective view of an…
FIG. 1 is a perspective view of an absorption board for an electric chuck used in semiconductor manufacture.
FIG. 2 is a front elevational view thereof.
FIG. 3 is a rear elevational view thereof.
FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image and not shown; and,
FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image and not shown.
Claims
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D553104-S | S1 | 16 Oct 2007 | 19 Oct 2004 | granted | Absorption board for an electric chuck used in semiconductor manufacture |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D110109-S1 | S1 | 11 Apr 2006 | 19 Oct 2004 | published | Adsorption board for electric chuck used in semiconductor manufacturing |
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