Sputtering chamber coil
Granted 6 Nov 2001 · no office action yet
Assignee: Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: John C. Forster, Michael Rosenstein, Zheng Xu, Praburam Gopalraja · Examiner: Antoine Duval Davis · AU 2913 · TC 2900
Life of the patent
4 dated eventsDescription
1 parts›FIG. 1 is a front elevational view; FIG…
FIG. 1 is a front elevational view;
FIG. 2 is a top view;
FIG. 3 is a right side elevational view;
FIG. 4 is a bottom view; and,
FIG. 5 is a rear elevational view of our sputtering chamber coil.
The left side elevation view (not shown) is the same as the right side elevational view (FIG. 3) because of coil symmetry.
Claims
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