The present invention provides a method for storing a raw material inside a mold or a crucible, comprising the steps of: closing an opening of the mold filled with the raw material of a sintered metal or an opening of the crucible filled with the raw material for encouraging growth of a crystal for a semiconductor of a gallium arsenide crystal and a silicon single crystal or a polycrystalline silicon by a cap provided with a supply pipe and a vacuum evacuation pipe; vacuuming the inside the mold or crucible to a high vacuum state of 10 âˆ’4 torr or less via the vacuum evacuation pipe; drying by heating the raw material in the mold or crucible filled with a heated inert gas in the range of 50 C. to 200 C. via the supply pipe; and storing the raw material in the mold or the crucible covered with the cap.

Claims

12 · 2 independent · depth 3

12 granted claims

›1.independentA method for storing a raw material inside a mold or a crucible, comprising the steps of:nclosing an opening of the mold filled with the raw material …+9

›2.↳ 1The method for storing the raw material according to claim 1, whereinnthe vacuuming step comprises roughly vacuuming and then vacuuming to a high vacu…d2+4

›9.↳ 1The method for storing the raw material according to claim 1, further comprising the steps of:nevacuating the heated inert gas after the drying step u…d2

›10.↳ 1The method for storing the raw material according to claim 1, further comprising the step of:ntransferring the mold closed with the cap in which the r…d2

›11.↳ 1The method for storing the raw material according to claim 1, further comprising the step of:nheating the raw material from outside of the mold or cru…d2

›12.↳ 1The method for storing the raw material according to claim 1, whereinnthe heated inert gas comprises a mono-silane gas.d2

›7.independentA storing device for storing a raw material, comprising:na mold or a crucible; anda cap;wherein an opening of the mold filled with the raw material of…+1

Classifications

8 codes

IPC · International Patent Classification

Section B — Performing operations; transporting

B22F3/00

Section C — Chemistry; metallurgy

C30B15/10
C30B11/00
C30B15/00
C30B29/06
C30B29/42

Section F — Mechanical engineering; lighting; heating; weapons

F26B3/18
F26B13/10

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Pendency

4.3 y

1,573 days filing → grant

Office actions

none on record

Responses

no RCE

Examiner

Stephen M Gravini

art unit 3744 · TC 3700

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Citations: 35 back · 0 forward

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Priority chain

1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20140223763 A1	14 Aug 2014

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