An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.

Claims

9 · 1 independent · depth 3

9 granted claims

›1.independentAn electrostatic charged particle beam lens comprising:nan electrode including a flat plate having a first surface having a normal line extending in a…+8

›2.↳ 1The charged particle beam lens according to claim 1 wherein, when an incircle and a circumcircle are respectively defined as two concentric circles ha…d2

›3.↳ 1The charged particle beam lens according to claim 1, wherein a thickness of each of the first region and the second region is smaller than a thickness…d2

›4.↳ 1The charged particle beam lens according to claim 1, wherein a thickness of the first region is larger than â…› of the representative diameter in the …d2

›5.↳ 1The charged particle beam lens according to claim 1, wherein at least one of the first region and the second region is stacked on or bonded to the thi…d2

›6.↳ 1The charged particle beam lens according to claim 1, wherein the electrode is covered by an electroconductive film.d2

›7.↳ 1The charged particle beam lens according to claim 1, wherein the electrode is an array having a plurality of openings and controlling electron optical…d2

›8.↳ 1An exposure apparatus comprising the charged particle beam lens according to claim 1 and using a charged particle beam.d2+1

Classifications

5 codes

IPC · International Patent Classification

Section H — Electricity

H01J37/18
H01J37/12

USPC · US Patent Classification

250/396.R250/492.3250/492.2

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Pendency

2.7 y

993 days filing → grant

Office actions

non-final + final

Responses

1 RCE

Examiner

Michael Logie

art unit 2881 · TC 2800

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Citations: 21 back · 0 forward

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1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20140151570 A1	5 Jun 2014

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