Film for back surface of flip-chip semiconductor
Granted 25 Nov 2014 · 10 office actions
Assignee: Nitto Denko
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Naohide Takamoto, Goji Shiga · Examiner: Chris Chu · AU 2815 · TC 2800
Life of the patent
3 dated eventsAbstract
The film for back surface of flip-chip semiconductor according to the present invention is a film for back surface of flip-chip semiconductor to be formed on a back surface of a semiconductor element having been flip-chip connected onto an adherend, wherein a tensile storage elastic modulus at 23° C. after thermal curing is 10 GPa or more and not more than 50 GPa. According to the film for back surface of flip-chip semiconductor of the present invention, since it is formed on the back surface of a semiconductor element having been flip-chip connected onto an adherend, it fulfills a function to protect the semiconductor element. In addition, since the film for back surface of flip-chip semiconductor according to the present invention has a tensile storage elastic modulus at 23° C. after thermal curing of 10 GPa or more, a warp of the semiconductor element generated at the time of flip-chip connection of a semiconductor element onto an adherend can be effectively suppressed or prevented.
Claims
13 · 1 independent · depth 4Classifications
13 codes- H01L23/00
- H01L21/78
- H01L29/40
- H01L21/50
- H01L23/31
- H01L23/48
- H01L23/52
- H01L23/544
- H01L21/683
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1 priority documents›Priority documents — 1
| Type | Document | Date |
|---|---|---|
| related publication | US 20130099394 A1 | 25 Apr 2013 |
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